MegaTorr® PS5 Rare Gas Purifiers
Contact your Entegris account manager or
- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
Specifications
Dimensions
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS5-MGT15 | 185 | 61 | 89 | <204 |
PS5-MGT30 | 185 | 61 | 89 | <204 |
PS5-MGT50 | 185 | 61 | 89 | <240 |
PS5-MGT100 | 185 | 120 | 89 | <500 |
PS5-MGT150 | 185 | 180 | 89 | <750 |
PS5-MGT200 | 185 | 242 | 89 | <1,000 |
PS5-MGT350 | 193 | 193 | 127 | <1,250 |
Outdoor Enclosure Options (OPAL) |
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Gases purified | He, Ar | ||
Impurities removed to <1 ppb | H2O, O2, CO, CO2, H2, N2, THC (including CH4) | ||
Maximum flow rates* | Nm3/hr | slpm | |
PS5-MGT15 | 15 | 250 | |
PS5-MGT30 | 30 | 500 | |
PS5-MGT50 | 50 | 833 | |
PS5-MGT100 | 100 | 1,667 | |
PS5-MGT150 | 150 | 2,500 | |
PS5-MGT200 | 200 | 3,333 | |
PS5-MGT350 | 350 | 5,833 | |
Maximum pressure drop | <1 bar (100 kPa) | ||
*Other flow rates are available. Contact Entegris for details. Note: Purifiers are gas specific and should only be used for the gases indicated. |
Standard Features |
Optional Features |
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