MegaTorr® PS9 Nitrogen Gas Purifiers
Contact your Entegris account manager or
- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
Specifications
Dimensions
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS9-MGT15 - PS9-MGT60 | 193 | 89 | 84 | <600 |
PS9-MGT100 - PS9-MGT200 | 193 | 132 | 135 | <1,700 |
PS9-MGT300 - PS9-MGT400 | 214 | 148 | 196 | <3,100 |
PS9-MGT500 - PS9-MGT700 | 237 | 237 | 191 | <3,850 |
PS9-MGT800 - PS9-MGT1800 | 266 | 253 | 315 | <6,800 |
PS9-MGT2000 - PS9-MGT3000 | 274 | 254 | 412 | <8,700 |
Outdoor Enclosure Options (OPAL) |
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Gas purified | N2 | ||
Impurities removed to <1 ppb | H2O, O2, CO, CO2, H2, CH4 | ||
Flow rates* | Nm3/hr | slpm | |
PS9-MGT15 - PS9-MGT60 | 15 - 60 | 250 - 1,000 | |
PS9-MGT100 - PS9-MGT200 | 100 - 200 | 1,667 - 3,333 | |
PS9-MGT300 - PS9-MGT400 | 300 - 400 | 5,000 - 6,667 | |
PS9-MGT500 - PS9-MGT700 | 500 - 700 | 8,333 - 11,667 | |
PS9-MGT800 - PS9-MGT1800 | 800 - 1,800 | 13,333 - 30,000 | |
PS9-MGT2000 - PS9-MGT3000 | 2,000 - 3,000 | 33,333 - 50,000 | |
*Other flow rates are available. Contact Entegris for details. | |||
Maximum pressure drop | <0.7 bar (70 kPa) PS9-MGT15 - PS9-MGT60 only <1 bar (100 kPa) |
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Note: Purifiers are gas specific and should only be used for the gas indicated. |
Standard Features |
Optional Features |
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