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Eximor® SV1 Filter Flushing Shell

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This flushing shell is an empty housing used for line flushing where Eximor^® point-of-use solvent filters are installed, instead of using the filter.

The flow path provides a cleaner, more efficient transitional flow-through solution for POU photochemical filtration and dispense
The flow-through device is compatible with Eximor filters
Minimizes hold-up volume enabling quick flush up and reduces chemical usage
The 8G model provides the lowest 1 mL hold-up volume and advanced cleanliness in all technology nodes
Clean, HDPE resin enhances organic, metal, and particle shedding performance and minimizes contamination sources

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Applications Eximor® SV1 Filter Flushing Shell Applications

Point-of-tool photolithography applications
RRC solvents

Specifications

Product Specifications

Hold-up volume	1 mL
Resin	Clean
Internal surface area	1.4 cm² (0.22 in²)
Operating conditions	Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) Maximum temperature: 40°C (104°F)
Note: The flushing shell is designed for short-term use (less than 1 month) in flushing chemical lines and systems.
Replace flushing shell with appropriate filter once line flushing is completed. Discard used flushing shells. Do not reuse. Do not use flushing shells in lieu of a filtration device or subject to long-term exposure to solvents in a pressurized environment. The warranty will be voided if the product is used in lieu of a filtration device or is subjected to long-term exposure to solvents in a pressurized environment. If expecting extended idle time in dispense line, we strongly urge customers to perform one of the following to avoid compromising flushing shell integrity: Depressurize line while flushing shell is installed. Dry the line and discontinue using the flushing shell.

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Reference Materials Product Documentation

Published Apr 14, 2022 Data Sheet Eximor® SV1 Filter Flushing Shell

143.6 kB

Published Apr 14, 2022 Data Sheet Eximor® SV1 Filter Flushing Shell - A4

143.6 kB

Part Numbers

Eximor® SV1 Filter Flushing Shell Part Numbers

Part Number	Product Type
EX00000K2	Eximor SV1 filter flushing shell