Contact Us
Careers
Language
Choose Language
- English
- 日本語
Currency
Choose Currency
- CNY ¥
- EUR €
- GBP £
- ILS ₪
- JPY ¥
- KRW ₩
- SGD $
- TWD NT$
- USD $
Search

Search

Product Search Results

Content Search Results

Eximor® SV1 Filter

Download Image

Advanced clean, point-of-use (POU) filter designed for critical photo-solvent applications including RRC solvents and NTD developers

Provides superior contaminant retention capabilities and rapid start-up performance in sub-28 nm technology nodes
Core fill structure reduces overall filter priming time leading to reduced filter start-up costs
Efficient priming promotes a rapid, stable, repeatable environment with low defectivity
Specially designed PE-based membrane technology reduces on-wafer defects and ensures tight retention and low pressure drop performance
Additional non-sieving retention further reduces particles and ensures the cleanest on-wafer solvents possible at startup

Read More Read Less

Specify Your Part

Product Type

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly.

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country/region

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

Company Address

You are required to accept the Captcha.

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Applications Eximor® SV1 Filter Applications

RRC solvents

Specifications

Drawings

Product Specifications

Materials	Membrane	UPE
	Shell, core, supports	High-density polyethylene (HDPE)
	O-ring (OF)	Kalrez^® perfluoroelastomer
Maximum operating conditions	Maximum inlet pressure	0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F)
	Maximum forward/reverse differential pressure	0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F)
	Maximum operating temperature	40°C (104°F)
Compatibility	Propylene glycol methyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), any other solvents (contact your local Entegris applications engineer for details)
Hold up volume	110 cc
Typical flow rate	250 cc/min (20°C, 1 mPa•s) with 0.03 MPa pressure drop
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date).

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Oct 12, 2021 Data Sheet Eximor® SV1 Filter

158.2 kB

Published Oct 12, 2021 Data Sheet Eximor® SV1 Filter - A4

158.2 kB

Part Numbers

Eximor® SV1 Filter Part Numbers

Part Number	Product Type
EX1KCL0K1	Eximor SV1 disposable filter