Microgard™ UPE/UPX Filter
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Applications
- Industry: Semiconductor, Chemical Manufacturing
- Process: Photolithography, Facilities, Wet Etch and Clean, Chemical Manufacturing
- Chemistry: Photoresist, Photochemicals, Solvents
- Installation Point: Bulk
Specifications
| UPE | UPX | ||
|---|---|---|---|
| Materials | Membrane | Hydrophobic UPE | Hydrophobic UPE |
| Supports, core, sleeve | HDPE | HDPE | |
| O-ring | E-FKM, EPDM | E-FKM or Kalrez® perfluoroelastomer | |
| Membrane area | 10": 8500 cm² (9.1 ft²) | 4": 5000 cm² (5.4 ft²) | |
| 20": 17,000 cm² (18.3 ft²) | 10": 11,000 cm² (11.8 ft²) | ||
| 30": 25,500 cm² (27.4 ft²) | |||
| Operating conditions | Maximum forward differential pressure | 0.35 MPa (3.5 bar, 50 psid, 3.5 kg/cm²) @ 25°C (77°F) | |
| Maximum reverse differential pressure | 0.27 MPa (2.7 bar, 40 psid, 2.8 kg/cm²) @ 20°C (68°F) | ||
| Operating temperature | 60°C (140°F) | ||
Successfully Opted for software Updates
Part Numbers
| Part Number | Lithography Technology | Typical Flow Rate | Chemlock® Key | Length | Retention Rating | Connection | O-ring |
|---|---|---|---|---|---|---|---|
| CWUA01P01 | KrF | Mid flux | No | 10" | 1 µm | Code 0 | E-FKM |
| CWUA01PLE | KrF | Low Flux | No | 10" | 1 µm | Code 0 | EPDM |
| CWUA01PLT | KrF | Low Flux | No | 10" | 1 µm | Code 0 | E-FKM |
| CWUA01PP1K | KrF | Mid flux | Yes | 10" | 1 µm | Code 0 | E-FKM |
| CWUA02HCT | KrF | Low Flux | No | 20" | 1 µm | Code 0 | E-FKM |
| CWUA02PLT | KrF | Low Flux | No | 20" | 1 µm | Code 0 | E-FKM |
| CWUA03PLT | KrF | Low Flux | No | 30" | 1 µm | Code 0 | E-FKM |
| CWUA51PLT | KrF | Low Flux | No | 10" | 1 µm | Code 5 | E-FKM |
| CWUG01P01 | KrF | Mid flux | No | 10" | 0.2 µm | Code 0 | E-FKM |
| CWUG01P01K | KrF | Mid flux | Yes | 10" | 0.2 µm | Code 0 | E-FKM |
| CWUG01PK1 | KrF | Mid flux | No | 10" | 0.2 µm | Code 0 | Perfrez® |
| CWUG01PK1K | KrF | Mid flux | Yes | 10" | 0.2 µm | Code 0 | Perfrez® |
| CWUG01PLE | KrF | Low Flux | No | 10" | 0.2 µm | Code 0 | EPDM |
| CWUG01PLEK | KrF | Low Flux | Yes | 10" | 0.2 µm | Code 0 | EPDM |
| CWUG01PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 0 | E-FKM |
| CWUG01PLTK | KrF | Low Flux | Yes | 10" | 0.2 µm | Code 0 | E-FKM |
| CWUG02PLE | KrF | Low Flux | No | 20" | 0.2 µm | Code 0 | EPDM |
| CWUG02PLT | KrF | Low Flux | No | 20" | 0.2 µm | Code 0 | E-FKM |
| CWUG03PLT | KrF | Low Flux | No | 30" | 0.2 µm | Code 0 | E-FKM |
| CWUG51PLE | KrF | Low Flux | No | 10" | 0.2 µm | Code 5 | EPDM |
| CWUG51PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 5 | E-FKM |
| CWUG52PLT | KrF | Low Flux | No | 20" | 0.2 µm | Code 5 | E-FKM |
| CWUG71PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 7 | E-FKM |
| CWUH01P01 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUH01PL0 | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUH01PLE | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | EPDM |
| CWUH01PP1K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUH01SCT | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUH02PL0 | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | None |
| CWUH02PLT | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | E-FKM |
| CWUH03PLT | KrF | Low Flux | No | 30" | 0.5 µm | Code 0 | E-FKM |
| CWUH53PS0 | KrF | Low Flux | No | 30" | 0.5 µm | Code 5 | None |
| CWUV01P01 | KrF | Mid flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
| CWUV01P01K | KrF | Mid flux | Yes | 10" | 0.1 µm | Code 0 | E-FKM |
| CWUV01PK1 | KrF | Mid flux | No | 10" | 0.1 µm | Code 0 | Perfrez® |
| CWUV01PK1K | KrF | Mid flux | Yes | 10" | 0.1 µm | Code 0 | E-FKM |
| CWUV01PLE | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | EPDM |
| CWUV01PLT | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
| CWUV01PLTD | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
| CWUV02PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 0 | EPDM |
| CWUV02PLT | KrF | Low Flux | No | 20" | 0.1 µm | Code 0 | E-FKM |
| CWUV03PLT | KrF | Low Flux | No | 30" | 0.1 µm | Code 0 | E-FKM |
| CWUV52PL0 | KrF | Low Flux | No | 20" | 0.1 µm | Code 5 | EPDM |
| CWUV52PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 5 | EPDM |
| CWUV72PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 7 | EPDM |
| CWUV73PLE | KrF | Low Flux | No | 30" | 0.1 µm | Code 7 | EPDM |
| CWUZ01P01 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUZ01P01K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUZ01PK1 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | Perfrez® |
| CWUZ01PK1K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | Perfrez® |
| CWUZ01PLE | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | EPDM |
| CWUZ01PLT | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
| CWUZ02PLT | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | E-FKM |
| CWUZ03PLT | KrF | Low Flux | No | 30" | 0.5 µm | Code 0 | E-FKM |
| CWUZ0SP01 | KrF | Mid flux | No | 4" | 0.5 µm | Code 0 | E-FKM |