Microgard™ UPE/UPX Filter
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- Industry: Semiconductor, Chemical Manufacturing
- Process: Photolithography, Facilities, Wet Etch and Clean, Chemical Manufacturing
- Chemistry: Photoresist, Photochemicals, Solvents
- Installation Point: Bulk
Specifications
UPE | UPX | ||
---|---|---|---|
Materials | Membrane | Hydrophobic UPE | Hydrophobic UPE |
Supports, core, sleeve | HDPE | HDPE | |
O-ring | E-FKM, EPDM | E-FKM or Kalrez® perfluoroelastomer | |
Membrane area | 10": 8500 cm² (9.1 ft²) | 4": 5000 cm² (5.4 ft²) | |
20": 17,000 cm² (18.3 ft²) | 10": 11,000 cm² (11.8 ft²) | ||
30": 25,500 cm² (27.4 ft²) | |||
Operating conditions | Maximum forward differential pressure | 0.35 MPa (3.5 bar, 50 psid, 3.5 kg/cm²) @ 25°C (77°F) | |
Maximum reverse differential pressure | 0.27 MPa (2.7 bar, 40 psid, 2.8 kg/cm²) @ 20°C (68°F) | ||
Operating temperature | 60°C (140°F) |
Successfully Opted for software Updates
Part Number | Lithography Technology | Typical Flow Rate | Chemlock® Key | Length | Retention Rating | Connection | O-ring |
---|---|---|---|---|---|---|---|
CWUA01P01 | KrF | Mid flux | No | 10" | 1 µm | Code 0 | E-FKM |
CWUA01PLE | KrF | Low Flux | No | 10" | 1 µm | Code 0 | EPDM |
CWUA01PLT | KrF | Low Flux | No | 10" | 1 µm | Code 0 | E-FKM |
CWUA01PP1K | KrF | Mid flux | Yes | 10" | 1 µm | Code 0 | E-FKM |
CWUA02HCT | KrF | Low Flux | No | 20" | 1 µm | Code 0 | E-FKM |
CWUA02PLT | KrF | Low Flux | No | 20" | 1 µm | Code 0 | E-FKM |
CWUA03PLT | KrF | Low Flux | No | 30" | 1 µm | Code 0 | E-FKM |
CWUA51PLT | KrF | Low Flux | No | 10" | 1 µm | Code 5 | E-FKM |
CWUG01P01 | KrF | Mid flux | No | 10" | 0.2 µm | Code 0 | E-FKM |
CWUG01P01K | KrF | Mid flux | Yes | 10" | 0.2 µm | Code 0 | E-FKM |
CWUG01PK1 | KrF | Mid flux | No | 10" | 0.2 µm | Code 0 | Perfrez® |
CWUG01PK1K | KrF | Mid flux | Yes | 10" | 0.2 µm | Code 0 | Perfrez® |
CWUG01PLE | KrF | Low Flux | No | 10" | 0.2 µm | Code 0 | EPDM |
CWUG01PLEK | KrF | Low Flux | Yes | 10" | 0.2 µm | Code 0 | EPDM |
CWUG01PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 0 | E-FKM |
CWUG01PLTK | KrF | Low Flux | Yes | 10" | 0.2 µm | Code 0 | E-FKM |
CWUG02PLE | KrF | Low Flux | No | 20" | 0.2 µm | Code 0 | EPDM |
CWUG02PLT | KrF | Low Flux | No | 20" | 0.2 µm | Code 0 | E-FKM |
CWUG03PLE | KrF | Low Flux | No | 30" | 0.2 µm | Code 0 | EPDM |
CWUG03PLT | KrF | Low Flux | No | 30" | 0.2 µm | Code 0 | E-FKM |
CWUG51PLE | KrF | Low Flux | No | 10" | 0.2 µm | Code 5 | EPDM |
CWUG51PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 5 | E-FKM |
CWUG52PLT | KrF | Low Flux | No | 20" | 0.2 µm | Code 5 | E-FKM |
CWUG71PLT | KrF | Low Flux | No | 10" | 0.2 µm | Code 7 | E-FKM |
CWUG73PLT | KrF | Low Flux | No | 30" | 0.2 µm | Code 7 | E-FKM |
CWUH01P01 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
CWUH01PL0 | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
CWUH01PLE | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | EPDM |
CWUH01PP1K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | E-FKM |
CWUH01SCT | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
CWUH02PL0 | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | None |
CWUH02PLE | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | EPDM |
CWUH02PLT | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | E-FKM |
CWUH03PLT | KrF | Low Flux | No | 30" | 0.5 µm | Code 0 | E-FKM |
CWUH53PS0 | KrF | Low Flux | No | 30" | 0.5 µm | Code 5 | None |
CWUV01P01 | KrF | Mid flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
CWUV01P01K | KrF | Mid flux | Yes | 10" | 0.1 µm | Code 0 | E-FKM |
CWUV01PK1 | KrF | Mid flux | No | 10" | 0.1 µm | Code 0 | Perfrez® |
CWUV01PK1K | KrF | Mid flux | Yes | 10" | 0.1 µm | Code 0 | E-FKM |
CWUV01PLE | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | EPDM |
CWUV01PLEK | KrF | Low Flux | Yes | 10" | 0.1 µm | Code 0 | EPDM |
CWUV01PLT | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
CWUV01PLTD | KrF | Low Flux | No | 10" | 0.1 µm | Code 0 | E-FKM |
CWUV02PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 0 | EPDM |
CWUV02PLT | KrF | Low Flux | No | 20" | 0.1 µm | Code 0 | E-FKM |
CWUV03PLT | KrF | Low Flux | No | 30" | 0.1 µm | Code 0 | E-FKM |
CWUV52PL0 | KrF | Low Flux | No | 20" | 0.1 µm | Code 5 | EPDM |
CWUV52PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 5 | EPDM |
CWUV72PLE | KrF | Low Flux | No | 20" | 0.1 µm | Code 7 | EPDM |
CWUV73PLE | KrF | Low Flux | No | 30" | 0.1 µm | Code 7 | EPDM |
CWUZ01P01 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
CWUZ01P01K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | E-FKM |
CWUZ01PK1 | KrF | Mid flux | No | 10" | 0.5 µm | Code 0 | Perfrez® |
CWUZ01PK1K | KrF | Mid flux | Yes | 10" | 0.5 µm | Code 0 | Perfrez® |
CWUZ01PLE | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | EPDM |
CWUZ01PLEK | KrF | Low Flux | Yes | 10" | 0.5 µm | Code 0 | EPDM |
CWUZ01PLT | KrF | Low Flux | No | 10" | 0.5 µm | Code 0 | E-FKM |
CWUZ02PLT | KrF | Low Flux | No | 20" | 0.5 µm | Code 0 | E-FKM |
CWUZ03PLT | KrF | Low Flux | No | 30" | 0.5 µm | Code 0 | E-FKM |
CWUZ0SP01 | KrF | Mid flux | No | 4" | 0.5 µm | Code 0 | E-FKM |
CWUZ72PLT | KrF | Low Flux | No | 20" | 0.05 µm | Code 7 | E-FKM |