Optimizer® HV Filter
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- Semiconductor photolithography applications
- Point-of-tool, high viscosity photochemical applications
Specifications
Materials | Membrane | Ultra high molecular weight polyethylene (UPE) |
Core, cage, and endcap | Polyethylene | |
O-ring | Kalrez® 6375UP perfluoroelastomer size 2-015 | |
Connections | Fits any 40-stack housing with 2-015 O-ring connection | |
Membrane Area | 3400 cm² (3.66 ft²) | |
Dimensions | Diameter | 66.7 mm (2.63") nominal |
Length | 113 mm (4.45") nominal | |
Maximum operating conditions | Maximum forward differential pressure | 0.34 MPa (3.4 bar, 50 psid) @ 25°C (77°F) |
Maximum reverse differential pressure | 0.27 MPa (2.7 bar, 39 psid) @ 25°C (77°F) | |
Maximum operating temperature | 60°C (140°F) | |
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). |
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