Optimizer® ST2 Filter Manifold

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Transitional photochemical dispense system flow-through-device for use with Optimizer^® point-of-use filters.

Provides higher flow rate and standard cleanliness in all technology nodes
Available in tube type, Flowell® 60 series elbow, and Flowell 80 series elbow configurations
Available in 1/4", 3/8", or 1/2" inlet/outlet sizes, with 1/4" vent

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Applications Optimizer® ST2 Filter Manifold Applications

Industry: Semiconductor (Photolithography, Chemical Manufacturing)
Chemistry: Photochemicals, Solvent
Installation Point: Point of Tool

Specifications

Drawings

Product Specifications

Materials	Tubes and wetted surfaces	PFA
	Nonwetted components	Stainless steel
	Release tab	POM
	O-ring	Perfluoroelastomer
Maximum inlet pressure	0.39 MPa (3.9 bar, 57 psi) @ 25°C (77°F)
Compatibility	Visit our Chemical Compatibility web page
Note: the Optimizer ST2 filter manifold is designed and tested to be used with Entegris filters and flushing shell only. The warranty will be voided if it is used with non-Entegris products.

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Reference Materials Product Documentation

Published Sep 1, 2022 Data Sheet Optimizer® Point-of-use Photochemical Filters

566.3 kB

Published Jul 1, 2021 Brochure Chasing the Perfect Pattern

1.4 MB

Published Sep 1, 2022 Manual and Guide Optimizer® ST2 Filter Manifold

7.4 MB

Part Numbers

Optimizer® ST2 Filter Manifold Part Numbers

Part Number	Fitting Type	Inlet/Outlet Fitting Size
AMVT222KT	Thin tube type	1/4"
AMVT332KT	Thin tube type	3/8"
AMVT442KT	Thin tube type	1/2"
AMVXL22KT	Flowell® 60 elbow	1/4"
AMVXL32KT	Flowell® 60 elbow	3/8"
AMVXL42KT	Flowell® 60 elbow	1/2"
AMVZL22KT	Flowell® 80EZ elbow	1/4"
AMVZL32KT	Flowell® 80EZ elbow	3/8"
AMVZL42KT	Flowell® 80EZ elbow	1/2"