Optimizer® ST2 Filter Manifold
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- Industry: Semiconductor (Photolithography, Chemical Manufacturing)
- Chemistry: Photochemicals, Solvent
- Installation Point: Point of Tool
Specifications
Materials | Tubes and wetted surfaces | PFA |
Nonwetted components | Stainless steel | |
Release tab | POM | |
O-ring | Perfluoroelastomer | |
Maximum inlet pressure | 0.39 MPa (3.9 bar, 57 psi) @ 25°C (77°F) | |
Compatibility | Visit our Chemical Compatibility web page | |
Note: the Optimizer ST2 filter manifold is designed and tested to be used with Entegris filters and flushing shell only. The warranty will be voided if it is used with non-Entegris products. |
Successfully Opted for software Updates
Part Number | Fitting Type | Inlet/Outlet Fitting Size |
---|---|---|
AMVT222KT | Thin tube type | 1/4" |
AMVT332KT | Thin tube type | 3/8" |
AMVT442KT | Thin tube type | 1/2" |
AMVXL22KT | Flowell® 60 elbow | 1/4" |
AMVXL32KT | Flowell® 60 elbow | 3/8" |
AMVXL42KT | Flowell® 60 elbow | 1/2" |
AMVZL22KT | Flowell® 80EZ elbow | 1/4" |
AMVZL32KT | Flowell® 80EZ elbow | 3/8" |
AMVZL42KT | Flowell® 80EZ elbow | 1/2" |