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Planarcap® NMB Filter

Best-in-class, point-of-dispense slurry filter with ultra-high particle loading capacity in sub 45 nm technology nodes, superior hard particle removal and gel retention performance.

  • Nanofiber continuous melt-blown (NMB) media technology enables superior agglomerate and gel removal, reduces microscratches, and extends filter lifetime
  • Point-of-dispense design provides best-in-class slurry filtration prior to slurry dispense onto the wafer
  • Available in 73 mm or 89 mm outside diameters, and 5" or 2-1/2" lengths
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