Planargard® APR Bulk CMP Filters
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Applications
- Bulk CMP slurry filtration
- Point-of-use (POU) slurry filtration
Specifications
| Length | A | B |
| 10" | 246 mm ±3 mm (9.68" ±0.12") | 266 mm ±3 mm (10.47" ±0.12") |
| 20" | 496 mm ±4 mm (19.53" ±0.16") | 516 mm ±4 mm (20.31" ±0.16") |
| 30" | 746 mm ±6 mm (29.37" ±0.23") | 766 mm ±6 mm (30.16" ±0.23") |
| 40" | 996 mm ±6 mm (39.21" ±0.23") | 1016 mm ±6 mm (40.00 ±0.23") |
| Materials: | Membrane: Polymeric/non-polymeric media combination |
| Core: Polypropylene | |
| Cartridge O-ring: EPR, FKM, silicone, 2-222 | |
| Product type: | NMB |
| Maximum operating conditions: | Maximum temperature: 80°C (176°F) |
| Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 psi) at 25°C (77°F) |
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