Planargard® NMB Filter
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Reference Materials
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Applications
- Ceria and colloidal silica bulk slurry filtration
- Sub-fab CDS filtration
Specifications
| Code 0 Filters Length | A | B | Code F Filters Length | A | B |
| 10" | 240 mm ±2 mm (9.45" ±0.08") | 263 mm ±2 mm (10.35" ±0.08") | 10" | 240 mm ±2 mm (9.45" ±0.08") | 251 mm ±2 mm (9.88" ±0.08") |
| 20" | 494 mm ±2 mm (19.45" ±0.08") | 517 mm ±2 mm (20.35" ±0.08") | 20" | 494 mm ±2 mm (19.45" ±0.08") | 505 mm ±2 mm (19.88" ±0.08") |
| 30" | 748 mm ±3 mm (29.45" ±0.12") | 771 mm ±3 mm (30.35" ±0.12") | 30" | 748 mm ±3 mm (29.45" ±0.12") | 758 mm ±3 mm (29.84" ±0.12") |
| 40" | 1002 mm ±3 mm (39.45" ±0.12") | 1024 mm ±3 mm (40.31" ±0.12") | 40" | 1002 mm ±3 mm (39.45" ±0.12") | 1013 mm ±3 mm (39.88" ±0.12") |
| Materials | Membrane | Polypropylene |
| Support | Polypropylene | |
| Cartridge O-ring | EPR, FKM, silicone, 2-222 | |
| Retention rating | Planargard NMB | 0.05, 0.07, 0.1, 0.3, 0.5 µm |
| Planargard NMB Plus | 0.7, 1, 3, 5 µm | |
| Maximum operating conditions | Maximum temperature | 80°C (176°F) |
| Maximum forward differential pressure | 0.48 MPa (4.8 bar, 70 psi) at 25°C (77°F) |
Successfully Opted for software Updates
Published Jan 1, 2014
Application Note
CMP Filter Characterization with Leading Slurry Particles
587.4 kB
Published Apr 24, 2018
Application Note
Effect of Flow Rate and Concentration on Filtration Efficiency of Colloidal Abrasives
588.9 kB
Part Numbers
| Part Number | Length | Retention Rating | Connection | O-ring |
|---|---|---|---|---|
| PNB0101006 | 10" | 0.1 µm | Code 0 | Silicone |
| PNB01010E6 | 10" | 0.1 µm | Code 0 | EPR |
| PNB01010V6 | 10" | 0.1 µm | Code 0 | FKM |
| PNB0102006 | 20" | 0.1 µm | Code 0 | Silicone |
| PNB01020E6 | 20" | 0.1 µm | Code 0 | EPR |
| PNB01020V6 | 20" | 0.1 µm | Code 0 | FKM |
| PNB0103006 | 30" | 0.1 µm | Code 0 | Silicone |
| PNB01030E6 | 30" | 0.1 µm | Code 0 | EPR |
| PNB01F10E6 | 10" | 0.1 µm | Code F | EPR |
| PNB01F20E6 | 20" | 0.1 µm | Code F | EPR |
| PNB01F30E6 | 30" | 0.1 µm | Code F | EPR |
| PNB03010E6 | 10" | 0.3 µm | Code 0 | EPR |
| PNB0302006 | 20" | 0.3 µm | Code 0 | Silicone |
| PNB03020E6 | 20" | 0.3 µm | Code 0 | EPR |
| PNB03030E6 | 30" | 0.3 µm | Code 0 | EPR |
| PNB03F10E6 | 10" | 0.3 µm | Code F | EPR |
| PNB03F20E6 | 20" | 0.3 µm | Code F | EPR |
| PNB03F30E6 | 30" | 0.3 µm | Code F | EPR |
| PNB03F40E6 | 40" | 0.3 µm | Code F | EPR |
| PNB05010E6 | 10" | 0.5 µm | Code 0 | EPR |
| PNB0502006 | 20" | 0.5 µm | Code 0 | Silicone |
| PNB05020E6 | 20" | 0.5 µm | Code 0 | EPR |
| PNB05030E6 | 30" | 0.5 µm | Code 0 | EPR |
| PNB05F10E6 | 10" | 0.5 µm | Code F | EPR |
| PNB05F20E6 | 20" | 0.5 µm | Code F | EPR |
| PNB05F30E6 | 30" | 0.5 µm | Code F | EPR |
| PNBA7010E6 | 10" | 0.07 µm | Code 0 | EPR |
| PNBA7010V6 | 20" | 0.07 µm | Code 0 | FKM |
| PNBA7020E6 | 20" | 0.07 µm | Code 0 | EPR |
| PNBA7020E6Q | 20" | 0.07 µm | Code 0 | EPR |
| PNBA7020V6 | 20" | 0.07 µm | Code 0 | FKM |
| PNBA7030E6 | 30" | 0.07 µm | Code 0 | EPR |
| PNBA7030V6 | 30" | 0.07 µm | Code 0 | FKM |
| PNBA7F10E6 | 10" | 0.07 µm | Code F | EPR |
| PNBA7F20E6 | 20" | 0.07 µm | Code F | EPR |
| PNBA7F30E6 | 30" | 0.07 µm | Code F | EPR |