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Torrento® X Filter

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Best-in-class filtration of aqueous, outgassing, and aggressive acid and base chemistries in sub 22 nm technology nodes. Enables high flow rate and retention performance.

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Specify Your Part

Filter Cleaning

Typical Flow Rate

Chemlock® Key

Form Factor

Length

Retention Rating

Connection

O-ring

Part Number:

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Applications Torrento® X Filter Applications

Industry: Semiconductor
Process: Wet Etch and Clean, Facilities
Chemistry: Aggressive Acids, Aggressive Bases, Resist Stripper
Installation Point: Point of Tool, Point of Dispense, Bulk

Specifications

Drawings

Performance Data

Product Specifications

		Torrento X Series Small Disposables 1000/1500	Torrento X Series Small Disposables 3000	Torrento ATE/AT3 Cartridges Chem-line™ I and II	Torrento ATE/AT3 Disposables
Materials:	Membrane:	Non-dewetting PTFE	Non-dewetting PTFE	Non-dewetting PTFE	Non-dewetting PTFE
	Supports, shell:	PFA		PFA
	Catridge O-ring options:		-	E-FKM, E-ETP, Kalrez^® (6375UP)	-
Surface area:		1000 type — 0.10 m² (1.1 ft²) 1500 type — 0.19 m²(2.05 ft²)	0.44 m² (4.74 ft²)
Rentention rating:		10 nm
Membrane area:			-	ATE 10"	2 m² (21 ft²)
				AT3 10"	3 m² (32 ft²)
Cartridge connections:				Code 0 (2-222) o-rings
Maximum operating conditions:	Maximum operating pressure:	0.59 MPa (5.9 bar; 86 psi) @ 25°C (77°F)		0.58 MPa (5.8 bar, 84 psi) @ 25°C (77°F)
		0.19 MPa (1.9 bar; 28 psi) @ 95°C (203°F)		0.097 MPa (0.97 bar, 14 psi) @ 200°C (392°F)
	Maximum forward differential pressure:	0.39 MPa (3.9 bar; 57 psi) @ 25°C (77°F)		0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F)
				0.05 MPa (0.52 bar, 7.5 psi) @ 200°C (392°F)
	Maximum reverse pressure:	0.29 MPa (2.9 bar; 42 psi) @ 25°C (77°F)		0.34 MPa (3.45 bar, 50 psi) @ 25°C (77°F)
	Maximum operating temperature:	95°C (203°F)		200°C (392°F)
Metallic extractables:	UCM Clean			Testing conducted for 16 metals
	X-UCM clean*	Testing conducted for 23 metals		Testing conducted for 23 metals
Other extractables:	UCM Clean			TOC, CI
	X-UCM clean*	TOC, CI, F	TOC, CI, F (for 10 nm)	TOC, CI, F

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Oct 1, 2022 Data Sheet Torrento® X Series Filters Featuring FlowPlane™ Linear Filtration Technology

1.7 MB

Published Jul 1, 2021 Brochure Liquid Filtration Solutions

2.1 MB

Published Jun 19, 2019 Spec Sheet Torrento® X Series Filters with 2 nm Retention

273.3 kB

Part Numbers

Torrento® X Filter Part Numbers

Part Number	Filter Cleaning	Typical Flow Rate	Chemlock® Key	Form Factor	Length	Retention Rating	Connection	O-ring
TR2T31CM01FP	UCM +	High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
TR2T31X142SP	X-UCM	High Flux	N/A	Chem-Line™ II Large Disposable	10"	10 nm	In-line male offset, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A
TR2T31XM01FP	X-UCM	High Flux	N/A	Chem-Line™ II Large Disposable	10"	10 nm	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
TR2T31XM41SP	X-UCM	High Flux	N/A	Chem-Line™ II Large Disposable	10"	10 nm	In-line male, 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A
TR2TE1X142SP	X-UCM	Mid flux	N/A	Chem-Line™ II Large Disposable	10"	10 nm	In-line male offset, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A
TR2TE1XM01FP	X-UCM	Mid flux	N/A	Chem-Line™ II Large Disposable	10"	10 nm	In-line male, 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
TRCT31C00KP	UCM +	High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-FKM
TRCT31C0B0P	UCM +	High Flux	No	Cartridge	10"	10 nm	Code 0	E-ETP
TRCT31C0BKP	UCM +	High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-ETP
TRCT31X0BKP	X-UCM	High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-ETP
TRCT32C0B0P	UCM +	High Flux	No	Cartridge	20"	10 nm	Code 0	E-ETP
TRCT32C0BKP	UCM +	High Flux	Yes	Cartridge	20"	10 nm	Code 0	E-ETP
TRCTE1C00KP	UCM +	Mid-High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-FKM
TRCTE1C0BKP	UCM +	Mid-High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-ETP
TRCTE1C0RKP	UCM +	Mid-High Flux	Yes	Cartridge	10"	10 nm	Code 0	Kalrez® 6375UP
TRCTE1X0B0P	X-UCM	Mid-High Flux	No	Cartridge	10"	10 nm	Code 0	E-ETP
TRCTE1X0BKP	X-UCM	Mid-High Flux	Yes	Cartridge	10"	10 nm	Code 0	E-ETP
TRCTE2C0BKP	UCM +	Mid-High Flux	Yes	Cartridge	20"	10 nm	Code 0	E-ETP
TRCTE2C0R0P	UCM +	Mid-High Flux	No	Cartridge	20"	10 nm	Code 0	Kalrez® 6375UP
TRDT31X902SP	X-UCM	High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	T-line rotated vent, 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A
TRDT31X942SP	X-UCM	High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A
TRPT10XM11FP	X-UCM	Low Flux	N/A	P1500 Small Disposable	4"	10 nm	1/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
TRSM04E00P6M31SP	UCM-10	Mid flux	N/A	FlowPlane™ Small Disposable	4"	7 nm	In-line male, 3/8" inlet/outlet, 1/4" vent drain, Super 300 Type Pillar® fitting	N/A
TRVT31C942SP	UCM +	High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A
TRVTE1C902SP	UCM +	Mid-High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	T-line rotated vent, 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A
TRVTE1C942SP	UCM +	Mid-High Flux	N/A	Chem-Line™ I Large Disposable	10"	10 nm	T-line rotated vent, 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting	N/A