Trinzik™ XFX Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Advanced bulk chemical production and final filtration
- Chemical delivery systems
- Single wafer and batch tools
Specifications
Trinzik XFX ATE Cartridge Filter | Trinzik XFX AT Cartridge Filter | ||||||
Dimensions | Dimensions | ||||||
Filter | A | B | C | Filter | A | B | C |
10" ATE | 244 mm (9.61") | 227 mm (8.94") | 225 mm (8.86") | 10" AT | 262.3 mm (10.33") | 245 mm (9.65") | 243 mm (9.57") |
20" ATE | 471 mm (18.54") | 454 mm (17.87") | 452 mm (17.80") | 20" AT | 498.3 mm (19.62") | 481 mm (18.94") | 479 mm (18.86") |
Trinzik XFX Chem-Line™ I Disposable Filter - Standard Vent | ||||
Dimensions | ||||
Filter | Connections | A | B | C |
10" T-line | T02H - 3/4" inlet/outlet; 1/2" vent/drain; Super Type Pillar® fittings | 396 mm (15.58") | 335 mm (13.19") | 180 mm (7.09") |
10" T-tube | B02S - 3/4" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 449 mm (17.69") | 369 mm (14.53") | 268 mm (14.35") |
Trinzik XFX Chem-Line I Disposable Filter - Core Vent | ||||
Dimensions | ||||
Filter | Connections | A | B | C |
10" T-line | T02S - 3/4" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 383 mm (15.06") | 324 mm (12.76") | 172 mm (6.77") |
10" T-line | T02H - 3/4" inlet/outlet; 1/2" vent/drain; Super Type Pillar fittings | 396 mm (15.58") | 335 mm (13.19") | 180 mm (7.09") |
Trinzik XFX Chem-Line I Disposable Filter - Core Vent (rotated) | ||||
Dimensions | ||||
Filter | Connections | A | B | C |
10" T-line | 902S - 3/4" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 391 mm (15.37") | 333 mm (13.11") | 172 mm (6.77") |
10" T-line | 942S - 1" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 391 mm (15.372") | 333 mm (13.11") | 182 mm (7.17") |
Trinzik XFX Chem-Line II Disposable Filter | |||
Dimensions | |||
Filter | Connections | A | B |
10" in-line offset | 102S - 3/4" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 349 mm (13.74") | 41 mm (1.63") |
10" in-line offset | 142S - 1" inlet/outlet; 1/2" vent/drain; Super 300 Type Pillar fittings | 380 mm (14.97") | 41 mm (1.63") |
10" in-line | M01F - 3/4" inlet/outlet; 1/4" vent/drain; Flaretek® fttings | 359 mm (14.13") | 37 mm (1.46") |
10" in-line | M01S - 3/4" inlet/outlet; 1/4" vent/drain; Super 300 Type Pillar fittings | 341 mm (13.41") | 37 mm (1.46") |
10" in-line | M41F - 1" inlet/outlet; 1/4" vent/drain; Flaretek fittings | 368 mm (14.47") | 37 mm (1.46") |
10" in-line | M41S - 1" inlet/outlet; 1/4" vent/drain; Super 300 Type Pillar fittings | 383 mm (15.07") | 37 mm (1.46") |
Trinzik XFX Cartridge Filter
Materials of construction: | Membrane: | Prewet, nondewetting PTFE |
Supports, core, sleeve: | PFA | |
O-ring: | E-ETP, Kalrez®, E-FKM | |
Membrane area: | 10", 20" ATE | ~2.2 m2 (23.68 ft2), ~4.4 m2 (47.36 ft2) |
10", 20" AT | ~0.9 m2 (9.69 ft2), ~1.8 m2 (19.37 ft2) | |
Cleanliness: | UCM | |
Maximum operating conditions: | Maximum operating pressure: | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) |
Maximum forward differential pressure: | >0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) 0.05 MPa (0.5 bar; 7.3 psi) @ 200°C (392°F) | |
Maximum reverse differential pressure: | 0.35 MPa (3.45 bar; 50 psi) @ 25°C (77°F) | |
Maximum temperature: | 200°C (392°F) | |
Extractables: | Metallic | UCM: Testing conducted for 16 metals |
Trinzik XFX Chem-Line I and Chem-Line II Disposable Filters
Materials of construction: | Membrane: | Prewet, nondewetting PTFE |
Supports, core, sleeve: | PFA | |
Membrane area: | 10" ATE | ~2.2 m2 (23.68 ft2) |
Cleanliness: | UCM | |
Connections: | Chem-Line I T-line, rotated vent | Super 300 Type Pillar® 3/4" or 1" inlet/outlet; 1/2" vent/drain |
Chem-Line II In-line | Flaretek® 3/4" or 1" inlet/outlet; 1/4" vent/drain | |
Maximum operating conditions: | Maximum operating pressure: | 0.58 MPa (5.8 bar; 84 psi) @ 25°C (77°F) |
Maximum forward differential pressure: | 0.44 MPa (4.4 bar; 64 psi) @ 25°C (77°F) 0.05 MPa (0.5 bar; 7.3 psi) @ 200°C (392°F) | |
Maximum reverse differential pressure: | 0.34 MPa (3.4 bar; 49 psi) @ 25°C (77°F) | |
Maximum temperature: | 200°C (392°F) | |
Extractables: | Metallic | UCM: Testing conducted for 16 metals |
Successfully Opted for software Updates
Part Number | Pleating | Inlet/Outlet | Vent/Drain | Form Factor | Length | O-ring | Chemlock® Key | Configuration |
---|---|---|---|---|---|---|---|---|
ZQ2TE1C102SP | ATE | 3/4" Super 300 Type Pillar® | 1/2" Super 300 Type Pillar® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line offset |
ZQ2TE1C142SP | ATE | 1" Super 300 Type Pillar® | 1/2" Super 300 Type Pillar® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line offset |
ZQ2TE1CM01FP | ATE | 3/4" Flaretek® | 1/4" Flaretek® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line |
ZQ2TE1CM01SP | ATE | 3/4" Super 300 Type Pillar® | 1/4" Super 300 Type Pillar® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line |
ZQ2TE1CM41FP | ATE | 1" Flaretek® | 1/4" Flaretek® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line |
ZQ2TE1CM41SP | ATE | 1" Super 300 Type Pillar® | 1/4" Super 300 Type Pillar® | Chem-Line™ II Large Disposable | 10" | N/A | N/A | In-line |
ZQCTE1C000P | ATE | N/A | N/A | Cartridge | 10" | E-FKM | No | N/A |
ZQCTE1C00KP | ATE | N/A | N/A | Cartridge | 10" | E-FKM | Yes | N/A |
ZQCTE1C0B0P | ATE | N/A | N/A | Cartridge | 10" | E-ETP | No | N/A |
ZQCTE1C0BKP | ATE | N/A | N/A | Cartridge | 10" | E-ETP | Yes | N/A |
ZQCTE1C0R0P | ATE | N/A | N/A | Cartridge | 10" | Perfrez® PXC Ultra | No | N/A |
ZQCTE1C0RKP | ATE | N/A | N/A | Cartridge | 10" | Perfrez® PXC Ultra | Yes | N/A |
ZQCTE2C000P | ATE | N/A | N/A | Cartridge | 20" | E-FKM | No | N/A |
ZQCTE2C00KP | ATE | N/A | N/A | Cartridge | 20" | E-FKM | Yes | N/A |
ZQCTE2C0B0P | ATE | N/A | N/A | Cartridge | 20" | E-ETP | No | N/A |
ZQCTE2C0BKP | ATE | N/A | N/A | Cartridge | 20" | E-ETP | Yes | N/A |
ZQCTE2C0R0P | ATE | N/A | N/A | Cartridge | 20" | Perfrez® PXC Ultra | No | N/A |
ZQCTE2C0RKP | ATE | N/A | N/A | Cartridge | 20" | Perfrez® PXC Ultra | Yes | N/A |
ZQCTT1C000P | AT | N/A | N/A | Cartridge | 10" | E-FKM | No | N/A |
ZQCTT1C00KP | AT | N/A | N/A | Cartridge | 10" | E-FKM | Yes | N/A |
ZQCTT1C0B0P | AT | N/A | N/A | Cartridge | 10" | E-ETP | No | N/A |
ZQCTT1C0BKP | AT | N/A | N/A | Cartridge | 10" | E-ETP | Yes | N/A |
ZQCTT1C0R0P | AT | N/A | N/A | Cartridge | 10" | Perfrez® PXC Ultra | No | N/A |
ZQCTT1C0RKP | AT | N/A | N/A | Cartridge | 10" | Perfrez® PXC Ultra | Yes | N/A |
ZQCTT2C00KP | AT | N/A | N/A | Cartridge | 20" | E-FKM | Yes | N/A |
ZQCTT2C0B0P | AT | N/A | N/A | Cartridge | 20" | E-ETP | No | N/A |
ZQCTT2C0BKP | AT | N/A | N/A | Cartridge | 20" | E-ETP | Yes | N/A |
ZQCTT2C0R0P | AT | N/A | N/A | Cartridge | 20" | Perfrez® PXC Ultra | No | N/A |
ZQCTT2C0RKP | AT | N/A | N/A | Cartridge | 20" | Perfrez® PXC Ultra | Yes | N/A |
ZQDTE1CB02SP | ATE | 3/4" Super 300 Type Pillar® | 1/2" Super 300 Type Pillar® | Chem-Line™ I Large Disposable | 10" | N/A | N/A | B-line standard vent |
ZQDTE1CT02HP | ATE | 3/4" Super Type Pillar® | 1/2" Super Type Pillar® | Chem-Line™ I Large Disposable | 10" | N/A | N/A | T-line standard vent |
ZQVTE1C902SP | ATE | 3/4" Super 300 Type Pillar® | 1/2" Super 300 Type Pillar® | Chem-Line™ I Large Disposable | 10" | N/A | N/A | T-line core vent (rotated) |
ZQVTE1CT02HP | ATE | 3/4" Super Type Pillar® | 1/2" Super Type Pillar® | Chem-Line™ I Large Disposable | 10" | N/A | N/A | T-line core vent |
ZQVTE1CT02SP | ATE | 3/4" Super 300 Type Pillar® | 1/2" Super 300 Type Pillar® | Chem-Line™ I Large Disposable | 10" | N/A | N/A | T-line core vent |