Multiple Reticle Pods

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Designed to protect, store, and transport up to six valuable lithography reticles cost effectively and with an extremely high degree of contamination protection.

Safely protect up to six masks in a small footprint
Ideal for storing multiple masks in a pod where space is limited
Holds either 5" or 6" masks
Interoperable with RSP150 load ports
Available with or without a metallic cassette
Built with ESD safe materials
A purged model is also available

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Specify Your Part

Dome Material

Mask Size

Ergo Handle Color

Cassette

Door Type

Part Number:

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CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

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Applications Multiple Reticle Pods Applications

Mask handling
Reticle handling

Specifications

Drawings

Product Specifications

Capacity	Up to six reticles
Reticle size	5" sq and 6" sq
UV transmissivity (ABS dome)	~0% at 470 nm
ESD performance	<2 seconds
Weight with cassette	2200 g
Footprint	214 mm x 230 mm (8.4" x 9.1")
Color	Transparent
Handle color options	Black, gray, red
Washability	No disassembly required

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Reference Materials Product Documentation

Published Jul 14, 2023 Data Sheet Multiple Reticle Pods

443.5 kB

Published Jul 14, 2023 Data Sheet Multiple Reticle Pods - A4

443.5 kB

Accessories Multiple Reticle Pods Accessories

9700-7755-01

150 mm MRP wafer lock kit

Part Numbers

Multiple Reticle Pods Part Numbers

Part Number	Dome Material	Mask Size	Ergo Handle Color	Cassette	Door Type
9700-3549-01	Clear polycarbonate	152 mm sq. (6" sq.)	Red	No	None
9700-9851-01	Clear ABS	152 mm sq. (6" sq.)	Red	No	None
9700-9851-02	Clear ABS	152 mm sq. (6" sq.)	Gray	No	None
9700-9851-50	Clear ABS	152 mm sq. (6" sq.)	Gray	Standard	Metal
9700-9851-51	Clear ABS	152 mm sq. (6" sq.)	Gray	Purge	Metal
9700-9852-02	Clear ABS	152 mm sq. (6" sq.)	Red	No	SRP
9700-9853-01	Clear ABS	152 mm sq. (6" sq.)	Red	No	With anti rotation pins
9700-9856-01	Clear ABS	127 mm sq. (5" sq.)	Black	No	With anti rotation pins