Reticle Pod Purge Cabinets
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- Reticle pod storage
- Reticle pod purge
Specifications
Capacity | 24, 36, 48, or 84 purge nests |
Purge interface | Either RSP150 SMIF or RSP200/EUV |
RFID recognition | Read/write capability |
Doors | Available if required |
Purge gas | 1 or 2 |
RSP150 SMIF footprint | 1.56 M L x 0.66 M W x 1.97 M H (5.12' L x 2.17' W x 6.46' H) |
RSP200/EUV footprint | 2.20 M L x 0.50 M W x 2.07 M H (7.22' L x 1.64' W x 6.79' H) |
3.33 M L x 0.50 M W x 2.07 M H (10.93' L x 1.64' W x 6.79' H) |
Successfully Opted for software Updates
Part Number | Interface | Purge Nests | Purge Gases | Pressure Controller |
---|---|---|---|---|
RSPX-DPC-048SS-31A | RSP150 | 48 | 1 | No |
RSPX-DPC-084SS-31A | RSP150 | 84 | 1 | No |
RSPX-DPC-084SS-31B | RSP150 | 84 | 1 | Yes |
RSPX-EUV-024 | RSP200/EUV | 24 | 1 | No |
RSPX-EUV-036 | RSP200/EUV | 36 | 1 | No |
RSPX-EUV-048 | RSP200/EUV | 48 | 1 | No |
RSPX-EUV-048-31B2G | RSP200/EUV | 48 | 2 | No |