Dummy Wafers
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- Deposition
- Sizes up to 300 mm
- Available in full round, notched or flats
Specifications
Typical Material Properties | |
---|---|
Properties: | SUPERSiC-3C |
Apparent density: | 3.15 g/cm3 (0.114 lb/in3) |
Bulk density: | 2.55 g/cm3 (0.092 lb/in3) |
Total porosity:1 | 20% |
Open porosity: 2 | 0% |
Total impurity level: | <10 ppm |
Flexural strength: | 155 MPa (22,400 psi) |
Tensile strength: | 129 MPa (18,700 psi) |
Elastic modulus: | 217 GPa (31 106 psi) |
Specific stiffness: | 85 kN.m/g |
Poisson’s ratio: | 0.17 |
Dynamic shear modulus: | 97 GPa (14 106 psi) |
Hardness knoop: | 1992 kg/mm2 |
Thermal diffusivity: | 100 mm2/s |
Thermal conductivity: | 170 W/m.K (98 Btu/hr/ft°F) |
Instantaneous CTE at RT: | 2.4 10-6/K (1.3 10-6/°F) |
1 Porosity is sealed under the dense coating; porosity is not exposed to the process.
2 Porosity sealed off by CVD SiC coating.
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