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A200 Wafer SMIF Pods

With an installed base of more than 200,000, the proven performance of our 200 mm wafer SMIF pod improves production yields and provides superior mini-environment control.

Materials of construction provide low particle generation, low outgassing, and long life
Purge compatible
Tough and durable polycarbonate shell withstands repeated and automatic handling
Static dissipative polycarbonate pod door significantly reduces likelihood of ESD damage
Cassette hold down is compatible with automated pod cleaning systems, reducing cost of ownership

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Dome Color

Dome Housing

Handle Color and Type

Wafer Retainer Type

Dome Top Interface

Door Type

Cassette Interface

Cassette Hold Downs

Door Gasket

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CAD CAD Files

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Applications A200 Wafer SMIF Pods Applications

Provides contamination control to semiconductor manufacturers during 200 mm wafer transport and storage operations:

Contamination-free wafer transport
Environmentally secure wafer storage

Specifications

Drawings

Product Specifications

Base dimensions	283 mm × 292 mm (11.125” × 11.5”)
Pod height (without top handle)	254 mm (10.0")
Weight (empty pod)	2.59 kg (5.7 lbs)
Weight (pod shell)	1.62 kg (3.6 lbs)
Weight (pod door)	0.87 kg (1.9 lbs)
Materials of construction
	Shell	Polycarbonate
	Door	Carbon-filled polycarbonate
	Wafer lock and frame	Polycarbonate
	Cassette hold down	Filled PTFE
	Cassette guides	Polycarbonate
Note: Conforms to SEMI^® E19.4

Product Options

Shell colors	Amber, green, clear
Identification	Bar code and alphanumeric character labels
	Color handles
	Laser marking bar codes and alphanumeric characters
	Card holder and traveler tag
Handling	Top automation handle
	Carrying handle

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Jun 10, 2022 Data Sheet A200 Wafer SMIF Pods

221.6 kB

Published Jun 10, 2022 Data Sheet A200 Wafer SMIF Pods - A4

221.6 kB

Published Jul 1, 2022 Manual and Guide A200 SMIF POD

1.6 MB

Part Numbers

A200 Wafer SMIF Pods Part Numbers

Part Number	Dome Color	Dome Housing	Handle Color and Type	Wafer Retainer Type	Dome Top Interface	Door Type	Cassette Interface	Cassette Hold Downs	Door Gasket
9700-4151-01	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200	Wide guide	Clear PC (CS02)	PBT standard
9700-4151-02	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	Top AK flange	A200	Wide guide	Clear PC (CS02)	PBT standard
9700-4152-14	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200	Narrow guide	Clear PC (CS04)	PBT standard
9700-4163-97	Amber	Gen IV	Black, M205	Gen IV wafer lock assembly - passive	None	A200	Wide guide	Clear PC (CS02)	PBT standard
9700-4249-08E	Clear	Gen IV	Yellow, Ergo	Gen IV wafer lock assembly - passive	Top AK flange	E200	Step guide	Green (CHD06)	PBT standard
9700-4249-09E	Clear	Gen IV	Gray, Ergo	Gen IV wafer lock assembly - passive	Top AK flange	E200	Step guide	Green (CHD06)	PBT standard
9700-4249-14E	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	E200	Step guide	Green (CHD06)	PBT standard
9700-4249-24E	Clear	Gen IV	Red, Ergo	Gen IV wafer lock assembly - passive	None	E200	Step guide	Green (CHD06)	PBT standard
9700-4249-24G4	Clear	Gen IV	Red, Ergo	Gen IV wafer lock assembly - passive	None	A200	Step guide	Green (CHD06)	PBT high durometer
9700-5330-01	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200	Wide guide	White (CHD04)	PBT standard
9700-5330-49MC	Clear	Gen IV	Black, Ergo M	Gen IV wafer lock assembly - passive	Top AK flange	A200	Wide guide	White (CHD04)	PBT standard
9700-5332-01	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200	Narrow guide	White (CHD04)	PBT standard
9700-5332-11	Clear	Gen IV	Red, Ergo	Gen IV wafer lock assembly - passive	None	A200	Narrow guide	White (CHD04)	PBT standard
9700-5333-01E	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	E200	Narrow guide	White (CHD04)	PBT standard
9700-5333-02E	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	E200	Wide guide	White (CHD04)	PBT standard
9700-5333-31D	Clear	Gen IV	Black, Ergo	N/A	Black carrying handle	A200 door, enhanced reliability	Narrow guide	None	PBT standard
9700-5333-51	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200 door, no lubricant	Narrow guide	White (CHD04)	PBT standard
9700-5464-07T	Clear	Gen IV	Black, Ergo	Gen IV wafer lock assembly - passive	None	E200	Special guide	White (CHD04)	PBT standard
9700-5700-01	Clear	Gen V	Black, pivot pistol grip	Gen V wafer lock assembly - passive	None	A200	Narrow guide	Red (CHD05)	PBT standard
9700-5700-18	Clear	Gen V	Black, pivot pistol grip	Gen V wafer lock assembly - passive	None	A200	Narrow guide	None	PBT standard
9700-5700-28	Clear	Gen V	Black, pivot pistol grip	Gen V wafer lock assembly - passive	None	A200	Narrow guide	None	PBT standard
9700-5700-98	Clear	Gen V	Black, pivot pistol grip	Gen V wafer lock assembly - passive	None	A200	Narrow guide	None	PBT standard
9700-5719-01	Clear	Gen IV FE	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200 FE door	Wide guide	White (CHD04)	PBT standard
9700-5819-01G4	Clear	Gen IV FE	Black, Ergo	Gen IV wafer lock assembly - passive	None	A200 door with FE hole	Narrow guide	White (CHD04)	PBT high durometer
9700-5819-02G4	Clear	Gen IV FE	Red, Ergo	Gen IV wafer lock assembly - passive	None	A200 door with FE hole	Narrow guide	White (CHD04)	PBT high durometer
9700-9655-02	Clear	Gen IV FE	Red, Ergo	Gen IV wafer lock assembly - passive	None	A200 FE door	Narrow guide	Clear PC (CS04)	PBT standard
9700-9666-01	Green	Gen IV	Red, Ergo	Gen IV wafer lock assembly - passive	None	A200 door with BE hole	Narrow guide	Clear PC (CS04)	PBT standard