As mega-trends, such as artificial intelligence and robotics, smart homes and smart cars, and the Internet of things evolve to meet growing needs for speed, scale, and reliability, they force integrated circuit (IC) manufacturers to increase processor power efficiency and memory size. To accomplish this, features sizes are shrinking, process complexity is increasing, and sensitivity to contamination and defects have a greater impact on device performance.
At Entegris, we understand the unique challenges of clean chemical delivery and work with customers to develop and optimize purity in fluid delivery systems. From fast and accurate measurement control, to advanced particle characterization, to safe and efficient fluid handling, we provide contamination-controlled solutions at each step throughout chemical manufacture to point of use. We can help you maintain chemical purity throughout the fluid path to achieve better device performance and increase yield.
Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use
This paper takes a closer look at ways to more comprehensively meet increasing purity specifications throughout chemical and device manufacturing.