high-performance filtration products

Gas Filtration and Purification


When it comes to filtration and purification of air, bulk gas or spec gas, Entegris has the expertise, the technology and the solution to meet your needs

Whether for point of use or bulk gas delivery, in chamber or on wafer, in the cleanroom or on a tool, Entegris has a long history of providing high-performance gas and air purification and filtration products to meet your needs.

Featured White Paper

Bowling for Contaminants: The New Science of Gas Purification