Entegris is excited to organize an open event on Clean and Sustainable Fluid Delivery for Semiconductor Manufacturing in Dresden on September 25. Take this unique opportunity to learn about Entegris’ optimized end-to-end solutions and discuss your challenges with our experts.
Entegris is excited to organize an open event on Clean and Sustainable Fluid Delivery for Semiconductor Manufacturing in Dresden on September 25. Take this unique opportunity to learn about Entegris’ optimized end-to-end solutions and discuss your challenges with our experts.
/content/entegris-live/en/home/about-us/events/clean-fluid-delivery-technology-day-2025Join Us
Thursday, September 25 | 9:30 AM – 4:15 PM
In today’s semiconductor landscape, the race toward faster time to market, higher complexity, and greener operations is accelerating. As fabs scale up and sustainability becomes a strategic imperative, fluid delivery systems—often operating behind the scenes—play a critical role in enabling both performance and environmental responsibility.
Clean and Sustainable Fluid Delivery for Semiconductor Manufacturing
This seminar brings together industry experts to explore the latest innovations in clean and sustainable fluid management across the semiconductor value chain. Join us for a deep dive from contamination control and chemical monitoring to gas purification and advanced packaging.
Whether you're designing a new fab or optimizing an existing one, this seminar will equip you with the tools and insights to enhance process purity, reduce waste, and meet your sustainability goals.
What You’ll Learn
- Contamination control strategies from spec to startup
- Innovations in filtration, purification, and real-time monitoring
- Predictive maintenance and chemical analysis
- Sustainable packaging and fluid handling solutions
- Practical tips to improve yield and reduce environmental impact
Spaces are limited—secure your spot today and be part of the movement toward cleaner, smarter, and more sustainable semiconductor manufacturing.
Featured Program
| 09:30 | Registration and Welcome Coffee |
| 10:00 |
Optimizing Fab Performance: Proven Strategies from Materials to Manufacturing
Antoine Amade, President, EMEA Region |
| 10:15 |
Contamination Control: The Cornerstone of Reliable Semiconductor Manufacturing Günter Haas, Ph.D., Field Application Engineer - Liquid Microcontamination Control |
| 10:45 |
Next-Gen Filtration and Purification: Cleaner Chemicals, Greener Fabs Günter Haas, Ph.D., Field Application Engineer - Liquid Microcontamination Control |
| 11:15 |
Break |
| 11:35 |
Gas Purity Meets Sustainability: From Plant to Process Tool Cristian Landoni, Senior Director - Gas Microcontamination Control |
| 12:10
|
Real-Time Chemical Monitoring: Smarter Processes, Less Waste Philipp Lehmann, Field Applications Engineer - Fluid Management |
| 12:45 |
Networking Lunch sponsored by Entegris |
| 14:00 |
Online Monitoring of CMP Slurries: Where Sensitivity Meets Prevention Patrick Ohagan, Application Scientist - Instrumentation |
| 14:20 |
Automated Titration in Action: Ensuring Quality, Reducing Waste Cyril To, Lead Account Manager |
| 14:40 |
Clean Fluid Delivery Systems: Overcoming Cleanliness and Safety Challenges Philipp Lehmann, Field Applications Engineer - Fluid Management |
| 15:15 |
Break |
| 15:35
|
From Bulk to Point-of-Use: Safe, Sustainable Liquid Packaging Philipp Lehmann, Field Applications Engineer - Fluid Management |
| 15:55 |
Advanced AMC Control: Cleaner Environment, Cleaner Wafers Ronny Rauschenbach, Field Applications Engineer - Gas Microcontamination Control |
| 16:15 | Wrap-up |
Speakers
Antoine Amade
President, EMEA Region
Cristian Landoni
Sr. Director, Gas Microcontamination Control
Philipp Lehmann
Field Application Engineer, Fluid Management Gases
Patrick Ohagan
Application Scientist, Instrumentation
Günter Haas
Ph.D., Field Application Engineer - Liquid Microcontamination Control
Cyril To
Lead Account Manager
Ronny Rauschenbach
Field Applications Engineer, Gas Microcontamination Control
Event Related Content
To achieve optimal wafer yield and reliability, the microelectronics industry needs to address increased materials consumption requirements and materials purity challenges from chemical manufacture to point of use.
Semiconductor device yields have long been impacted by contamination. As process nodes continue to shrink to 5 nm and features become more complex — pushing the manufacturing challenges of chip designs to new limits — the sensitivity to contamination during manufacturing processes has increased significantly. To meet the needs of these applications, gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability.
New material always introduces risks to semiconductor manufacturing - even in components such as tubing and valves. Manufacturers have moved away from stainless steel valves due to the need for increased material and chemical purity. Replacing stainless steel with PFA valves and tubing can deliver increased purity, but at the cost of increased safety risks.
Dual containment tubing (DCT) installs easily in areas that are densely populated with other facility plumbing or infrastructure where it is difficult to route rigid PVC containment pipe. It is a safe, reliable system that can be installed or retrofitted in mere hours instead of days.