Join Us | Hall N5, Booth 5165
Entegris has recently expanded production and research capabilities in Asia, and SEMICON China creates the perfect forum for us to showcase our expansions. We’ll be displaying new solutions specifically designed to help chipmakers lower costs, ramp production, and improve SiC wafer quality. Learn how we can help you with workflows that include chemical delivery, chemical mechanical planarization, photolithography, and more.
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Chemical Mechanical Planarization (CMP)
Entegris is a single-source solution for the CMP process. We offer slurries, filters, monitoring systems, pads, pad conditioners, post-CMP cleans, and more. Our ecosystem not only helps improve performance, but also helps speed innovations to market.
Learn how our materials science and materials purity expertise can help manufacturers increase yield and reduce defects during SiC wafer production.