Clean, Photochemical Delivery
The pursuit of the Fourth Industrial Revolution is driving developments in technology megatrends including artificial intelligence (AI) chips, 5G networks, autonomous vehicles, and smart manufacturing. Now semiconductor device manufacturing has reached a turning point, where node scaling is not enough to meet the varied needs in computing performance, functionality, and power these new applications require.
In fact, node scaling is predicted to max out at 3 nm, and only three companies are pursuing this node. As such, manufacturers of logic and memory alike are turning to vertical architectures like fin field-effect transistors (FinFETS), 3D NAND, and 3D integrated circuits (ICs) as early as 14 nm. Additionally, fabs and integrated device manufacturers (IDMs) are turning to heterogeneous integration technologies to build integrated systems that will rival the human brain in intelligence.
The solution to maintaining a safe and contamination-controlled chemical delivery environment in the fab is to seek out simplified single-sourced chemical packaging, filtration, and handling products that will increase product yield and reduce financial loss. To make sure of an end-to-end optimum process environment, it is important to take a close look at each stage of the chemical supply chain. While it may seem insignificant, the right clean chemical delivery pump can make or break the entire chain. Knowing what to look for in a pump is the first step in making the right tool choice.
Featured White Paper
Pump it Up: Photochemical Delivery that Meets the Challenges of the Fourth Industrial Revolution
To make sure of an end-to-end optimum process environment, it is important to look at each stage of the chemical supply chain. This paper provides a close look at how to maintain purity and prevent device defects during photochemical delivery to processing tools by using clean, chemical delivery pumps.
Case Study
On-Wafer Defect Reduction in Lithography
In collaboration with STMicroelectronics, this paper looks at how to effectively collect data to improve your photolithography process control strategy and lower on-wafer defectivity.
Featured Pictogram
Choosing the Right Pump to Ensure Clean Chemical Delivery in Advanced Lithography
Pictorial illustrating the importance of choosing the right photochemical delivery pump to prevent device defects, maintain purity, and ensure clean chemical delivery in advanced lithography.
