EP PFA Pneumatic Valves, 1 1/2" and 2", 2-way
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Bulk chemical delivery in the semiconductor and flat panel display markets
- High-purity, corrosive chemical handling within the semiconductor and flat panel display markets
Specifications
Dimensions | |||
Port connection | Flow factor | A | B |
1-1/2" EP PFA flare | 16.6 Cv (14.4 Kv) | 75.0 mm (2.95") | 225.0 mm (8.86") |
1-1/2" PrimeLock | 16.6 Cv (14.4 Kv) | 78.0 mm (3.07") | 232.0 mm (9.13") |
1-1/2" PrimeLock (40 mm) | 16.6 Cv (14.4 Kv) | 78.0 mm (3.07") | 232.0 mm (9.13") |
1-1/2" PureBond pipe (40A) | 38.5 Cv (33.3 Kv) | 48.3 mm (1.90") | 220.0 mm (8.66") |
2" PureBond pipe (50A) | 49.1 Cv (42.5 Kv) | 60.3 mm (2.37") | 220.0 mm (8.66") |
2" EP PFA flare | 42.3 Cv (36.6 Kv) | 92.0 mm (3.74") | 329.0 mm (12.9") |
Materials | All wetted parts parts | PFA, PTFE | |
Nonwetted parts | Copper, Viton®, stainless steel 304, brass, PP+G/F, PC | ||
Pressure range | 689.5 kPa (100 psig) @ 21°C (70°F) fluid temperature | ||
Temperature range | 21° to 90°C (70° to 194°F) | ||
Pneumatic supply port | 1/8" PT | ||
Pneumatic supply pressure | 414 kPa (60 psig) minimum to 586 kPa (85 psig) maximum |
Successfully Opted for software Updates
-
01-1035661
Remote position indication sensor mounting assembly for Integra® Plus WS pneumatic valves and EP PFA pneumatic valves
Part Number | Port Connection | Actuator | Actuator Location | Fasteners |
---|---|---|---|---|
PLPV-F24 | 1 1/2" EP PFA Flare | Pneumatic normally closed | Standard | Stainless steel |
PLPV-F24-OM | 1 1/2" EP PFA Flare | Pneumatic normally closed (Omron sensor) | Standard | Stainless steel |
PLPV-F32-45D-N | 2" EP PFA flare | Pneumatic normally closed | Rotated +45° | Stainless steel |
PLPV-F32-90D-N | 2" EP PFA flare | Pneumatic normally closed | Rotated +90° | Stainless steel |
PLPV-F32-N | 2" EP PFA flare | Pneumatic normally closed | Standard | Stainless steel |
PLPV-F32-OM | 2" EP PFA flare | Pneumatic normally closed (Omron sensor) | Standard | Stainless steel |
PLPV-K24 | 1 1/2" PrimeLock® | Pneumatic normally closed | Standard | Stainless steel |
PLPV-P24 | 1 1/2" PureBond® pipe (40A) | Pneumatic normally closed | Standard | Stainless steel |
PLPV-P24-90D | 1 1/2" PureBond® pipe (40A) | Pneumatic normally closed | Rotated +90° | Stainless steel |
PLPV-P24-C | 1 1/2" PureBond® pipe (40A) | Pneumatic normally closed | Standard | Coated stainless steel |
PLPV-P24-C-OM | 1 1/2" PureBond® pipe (40A) | Pneumatic normally closed (Omron sensor) | Standard | Coated stainless steel |
PLPV-P24-OM | 1 1/2" PureBond® pipe (40A) | Pneumatic normally closed (Omron sensor) | Standard | Stainless steel |
PLPV-P32 | 2" PureBond® pipe (50A) | Pneumatic normally closed | Standard | Stainless steel |
PLPV-P32-45D | 2" PureBond® pipe (50A) | Pneumatic normally closed | Rotated +45° | Stainless steel |
PLPV-P32-45D-C | 2" PureBond® pipe (50A) | Pneumatic normally closed | Rotated +45° | Coated stainless steel |
PLPV-P32-45D-C-OM | 2" PureBond® pipe (50A) | Pneumatic normally closed (Omron sensor) | Rotated +45° | Coated stainless steel |
PLPV-P32-45D-OM | 2" PureBond® pipe (50A) | Pneumatic normally closed (Omron sensor) | Rotated +45° | Stainless steel |
PLPV-P32-90D | 2" PureBond® pipe (50A) | Pneumatic normally closed | Rotated +90° | Stainless steel |
PLPV-P32-90D-C | 2" PureBond® pipe (50A) | Pneumatic normally closed | Rotated +90° | Coated stainless steel |
PLPV-P32-90D-OM | 2" PureBond® pipe (50A) | Pneumatic normally closed (Omron sensor) | Rotated +90° | Stainless steel |
PLPV-P32-C | 2" PureBond® pipe (50A) | Pneumatic normally closed | Standard | Coated stainless steel |
PLPV-P32-C-OM | 2" PureBond® pipe (50A) | Pneumatic normally closed (Omron sensor) | Standard | Coated stainless steel |
PLPV-P32-OM | 2" PureBond® pipe (50A) | Pneumatic normally closed (Omron sensor) | Standard | Stainless steel |
PLPVO-P24 | 1 1/2" PureBond® pipe (40A) | Pneumatic normally open | Standard | Stainless steel |
PLPVO-P24-90D | 1 1/2" PureBond® pipe (40A) | Pneumatic normally open | Rotated +90° | Stainless steel |
PLPVO-P32-90D | 2" EP PFA flare | Pneumatic normally open | Rotated +90° | Stainless steel |