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  • Flow Range
  • Industry
  • Process
Integrated flow controller flow range 15 - 1250 mL/min differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller
Flow Range
  • 0-1250 mL/min
Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • Lithography
  • Cleaning
Integrated Flow Controller Flow range 2.5 - 40 L/min. combine Entegris’ differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller
Flow Range
  • 2.5-40 L/min
Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • Cleaning
  • Lithography
  • Magnetic Head - Photolithography
  • Media - Cleaning
  • Media - IPA
  • Substrate - IPA
  • Substrate - Polishing
  • Substrate - Cleaning
  • HDD Assembly - Cleaning
  • HGA/HSA Assembly - Cleaning
Using the latest electronic technology and high-purity materials, the NT™ Integrated Flow Controller, Model 6500 provides precision flow control in legacy applications.
Flow Range
  • 0-40 L/min (legacy product)
Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Cleaning
  • Lithography
Accessory cable used to terminate electrical cables on our InVue® Integrated Flow Controllers, models NT6510 and NT6520
Flow Range
  • N/A
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