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GateKeeper® HGU Heated Catalyst XCDA®, Oxygen Gas Purifiers
Interested in GateKeeper® HGU Heated Catalyst XCDA®, Oxygen Gas Purifiers?
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Reference Materials
Applications
Purifies O2 and XCDA gases for semiconductor applications and are ideal in the following applications:
- Optical fiber manufacuring
- Photolithography
- Mask pattern generation
Specifications
Features |
|
| Gases purified | O2, XCDA | ||
| Impurites removed | H2, CO2, THC (including CH4) < 1 ppb | ||
| Note: | Purifiers are gas specific and should only be used for the gases indicated | ||
| Part Number | Purifier type | Maximum flow rate | Power |
| PS15-GC50-CDA-1 | XCDA | 3 slpm (0.18 Nm3/hr) | 110 - 120 VAC |
| PS15-GC50-CDA-2 | XCDA | 3 slpm (0.18 Nm3/hr) | 220 - 240 VAC |
| PS15-GC50-CDA-1-V | XCDA | 3 slpm (0.18 Nm3/hr) | 110 - 120 VAC |
| PS15-GC50-CDA-2-V | XCDA | 3 slpm (0.18 Nm3/hr) | 220 - 240 VAC |
| PS15-GC50-O-1 | Oxygen | 3 slpm (0.18 Nm3/hr) | 110 - 120 VAC |
| PS15-GC50-O-2 | Oxygen | 3 slpm (0.18 Nm3/hr) | 220 - 240 VAC |
| PS15-GC50-O-1-V | Oxygen | 3 slpm (0.18 Nm3/hr) | 110 - 120 VAC |
| PS15-GC50-O-2-V | Oxygen | 3 slpm (0.18 Nm3/hr) | 220 - 240 VAC |
| PS15-MT3-CDA-1 | XCDA | 10 slpm (0.6 Nm3/hr) | 110 - 120 VAC |
| PS15-MT3-CDA-2 | XCDA | 10 slpm (0.6 Nm3/hr) | 220 - 240 VAC |
| PS15-MT3-O-1 | Oxygen | 10 slpm (0.6 Nm3/hr) | 110 - 120 VAC |
| PS15-MT3-O-2 | Oxygen | 10 slpm (0.6 Nm3/hr) | 220 - 240 VAC |
| BYPS-3 | Optional bypass assembly | ||
| PS15-MT15-CDA-1 | XCDA | 30 slpm (1.8 Nm3/hr) | 110 - 120 VAC |
| PS15-MT15-CDA-2 | XCDA | 30 slpm (1.8 Nm3/hr) | 220 - 240 VAC |
| PS15-MT15-O-1 | Oxygen | 30 slpm (1.8 Nm3/hr) | 110 - 120 VAC |
| PS15-MT15-O-2 | Oxygen | 30 slpm (1.8 Nm3/hr) | 220 - 240 VAC |
| PS15-MT50-CDA-1 | XCDA | 100 slpm (6 Nm3/hr) | 110 - 120 VAC |
| PS15-MT50-CDA-2 | XCDA | 100 slpm (6 Nm3/hr) | 220 - 240 VAC |
| PS15-MT50-O-1 | Oxygen | 100 slpm (6 Nm3/hr) | 110 - 120 VAC |
| PS15-MT50-O-2 | Oxygen | 100 slpm (6 Nm3/hr) | 220 - 240 VAC |
| PS15-MT50-MODBUS | Optional Modbus customer interface connection | ||
| PS15-MT50-EMO | Optional emergency off button | ||
| Note: | Higher flow rates are available upon request. | ||
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