MegaTorr^® Adsorber and Getter Hydrogen Gas Purifiers

These PS7-H bulk gas adsorber and getter beds efficiently remove numerous impurities with high reliability, low cost, and high performance.

Uses a combination of heated getter and ambient catalytic adsorption processes to provide ultra-high purity hydrogen (H₂) gas for semiconductor applications
Two ambient temperature adsorber vessels remove water (H₂O), oxygen (O₂), CO, and CO₂, while the downstream getter vessel, operated at an elevated temperature, eliminates nitrogen (N₂) and methane (CH₄)
Two adsorber vessels altermate between purity and regeneration mode, providing continuous purification
Adsorber regeneration is accomplished by back flushing with purified hydrogen at elevated temperatures
Optimized design provides sub-ppb performance in small footprints with flow rates up to 3,333 slpm (200 Nm³/hr)

Interested in MegaTorr^® Adsorber and Getter Hydrogen Gas Purifiers?

Contact your Entegris account manager or

Top of page

Applications MegaTorr^® Adsorber and Getter Hydrogen Gas Purifiers Applications

Product Specifications

Gas purified	H₂
Impurities removed	H₂O, O₂, CO, CO₂, THC (including CH₄), N₂ < 1 ppb
Maximum flow rates
PS7-MGT20	20 Nm³/hr (333 slpm)
PS7-MGT40	40 Nm³/hr (667 slpm)
PS7-MGT100	100 Nm³/hr (1,667 slpm)
PS7-MGT200	200 Nm³/hr (3,333 slpm)
Maximum pressure drop	< 1 bar (100 kPa)
Average power consumption
PS7-MGT20	4 kW
PS7-MGT40	8 kW
PS7-MGT100	22 kW
PS7-MGT200	50 kW
Note:	Purifiers are gas specific and should only be used for the gas indicated

Standard Features
Automated microprocessor controller Touchscreen operation interface Password protected control system System alarms Temperature interlocks N₂ purged secondary enclosure H₂ leak detection sensor Vented cabinet purge Over-pressurization safety relief system	Electric gas preheater Dual, closed-loop temperature controls Redundant heating elements Pressure transducers Battery backup Back-up pneumatic reservoir Water cooled heat exchanger All metal enclosure with doors

Customer Interface Connections	Optional Features
Alarm relay - fail safe relay contacts allow remote alarm condition detection Remote contact shutdown - allows remote purifier shutdown Mass flowmeter and totalizer 4-20 mA is available when MFM is specified	Mass flowmeter with 4-20 mA output Internal auto bypass Separate control power UPS - uninterruptible power supply

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Sep 4, 2019 Brochure Gas Purification Solutions

Download PDF 586.1 kB

MegaTorr® Adsorber and Getter Hydrogen Gas Purifiers