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MegaTorr® Adsorber and Getter Hydrogen Gas Purifiers
Interested in MegaTorr® Adsorber and Getter Hydrogen Gas Purifiers?
Contact your Entegris account manager or
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Reference Materials
Applications
- Purifies H2 gas for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS7-MGT20-H | 205 | 161 | 120 | < 862 |
PS7-MGT40-H | 205 | 161 | 120 | < 862 |
PS7-MGT100-H | 198 | 130 | 163 | < 1,365 |
PS7-MGT200-H | 226 | 193 | 193 | < 2,500 |
Gas purified | H2 | |
Impurities removed | H2O, O2, CO, CO2, THC (including CH4), N2 < 1 ppb | |
Maximum flow rates | ||
PS7-MGT20 | 20 Nm3/hr (333 slpm) | |
PS7-MGT40 | 40 Nm3/hr (667 slpm) | |
PS7-MGT100 | 100 Nm3/hr (1,667 slpm) | |
PS7-MGT200 | 200 Nm3/hr (3,333 slpm) | |
Maximum pressure drop | < 1 bar (100 kPa) | |
Average power consumption | ||
PS7-MGT20 | 4 kW | |
PS7-MGT40 | 8 kW | |
PS7-MGT100 | 22 kW | |
PS7-MGT200 | 50 kW | |
Note: | Purifiers are gas specific and should only be used for the gas indicated |
Standard Features | |
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Customer Interface Connections | Optional Features |
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Outdoor Enclosure Options (OPAL)
For outdoor installation, see our outdoor enclosure options
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