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MegaTorr® PS7-A Hydrogen Gas Purifiers

These PS7-A auto regenerable bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

  • Uses adsorption processes to provide ultra-high purity hydrogen (H2) gas for semiconductor applications
  • Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
  • Adsorber regeneration is accomplished by back flushing with purified H2 at an elevated temperature
  • Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm3/hr)
  • Read More Read Less
Interested in MegaTorr® PS7-A Hydrogen Gas Purifiers?

Contact your Entegris account manager or

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