MegaTorr^® Auto Regenerable Hydrogen Gas Purifiers

These PS7-A bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Uses catalytic and adsorption processes to provide ultra-high purity hydrogen (H₂) gas for semiconductor applications
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
Adsorber regeneration is accomplished by back flushing with purified H₂at an elevated temperature
Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)

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Applications MegaTorr^® Auto Regenerable Hydrogen Gas Purifiers Applications

Product Specifications

Gas purified	H₂
Impurities removed	H₂O, O₂,CO, CO₂, THC (including CH₄) <1ppb
Flow rates*	Nm³/hr	slpm
PS7-MGS10-A - PS7-MGS40-A	10 - 40	167 - 667
PS7-MGS50-A - PS7-MGS60-A	50 - 60	833 - 1,000
PS7-MGS90-A - PS7-MGS120-A	90 - 120	1,500 - 2,000
PS7-MGT200-A	200	3,333
*Other flow rates are available. Contact Entegris for details.
Maximum pressure drop	< 0.7 bar (70 kPa)
Note:	Purifiers are gas specific and should only be used for the gas indicated

Standard Features	Optional Features
Automated microprocessor controller HMI (Human Machine Interface) Password protected control system System alarms H₂ leak detection sensor Vented cabinet purge High-temperature hardware interlock Over-pressurization safety relief system	Mass flowmeter with 4-20 mA output Inlet and outlet pressure transducers Instrument air management system Auto or manual bypass Ultrafine 0.003 µm particle filter Separate control power UPS - uninterruptible power supply MODBUS data communication port Inert gas piping system purge Factory regenerable or automatically regenerable purifier in the bypass line

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Sep 4, 2019 Brochure Gas Purification Solutions

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MegaTorr® Auto Regenerable Hydrogen Gas Purifiers