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MegaTorr® Auto Regenerable Hydrogen Gas Purifiers
Interested in MegaTorr® Auto Regenerable Hydrogen Gas Purifiers?
Contact your Entegris account manager or
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Reference Materials
Applications
- Purifies H2 gas for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS7-MGS10-A - PS7-MGS40-A | 138 | 80 | 40 | < 110 |
PS7-MGS50-A - PS7-MGS60-A | 168 | 87 | 61 | < 180 |
PS7-MGS90-A - PS7-MGS120-A | 199 | 92 | 69 | < 300 |
PS7-MGT200-A | 208 | 130 | 163 | < 1,361 |
Gas purified | H2 | ||
Impurities removed | H2O, O2, CO, CO2, THC (including CH4) <1ppb | ||
Flow rates* | Nm3/hr | slpm | |
PS7-MGS10-A - PS7-MGS40-A | 10 - 40 | 167 - 667 | |
PS7-MGS50-A - PS7-MGS60-A | 50 - 60 | 833 - 1,000 | |
PS7-MGS90-A - PS7-MGS120-A | 90 - 120 | 1,500 - 2,000 | |
PS7-MGT200-A | 200 | 3,333 | |
*Other flow rates are available. Contact Entegris for details. | |||
Maximum pressure drop | < 0.7 bar (70 kPa) | ||
Note: | Purifiers are gas specific and should only be used for the gas indicated |
Standard Features | Optional Features |
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Outdoor Enclosure Options (OPAL)
- For outdoor installation, see our outdoor enclosure options
Factory Regenerable Bulk Gas Purifiers (PS14)
- Ambient temperature weld gas or temporary purification
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