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MegaTorr® PS7-H Hydrogen Gas Purifiers

These PS7-H bulk gas adsorber and getter beds efficiently remove numerous impurities with high reliability, low cost, and high performance.

  • Uses a combination of heated getter and ambient catalytic adsorption processes to provide ultra-high purity hydrogen (H2) gas for semiconductor applications
  • Two ambient temperature adsorber vessels remove water (H2O), oxygen (O2), CO, and CO2, while the downstream getter vessel, operated at an elevated temperature, eliminates nitrogen (N2) and methane (CH4)
  • Two adsorber vessels alternate between purity and regeneration mode, providing continuous purification
  • Adsorber regeneration is accomplished by back flushing with purified hydrogen at elevated temperatures
  • Optimized design provides sub-ppb performance in small footprints with flow rates up to 3,333 slpm (200 Nm3/hr)
  • Read More Read Less
Interested in MegaTorr® PS7-H Hydrogen Gas Purifiers?

Contact your Entegris account manager or

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