MegaTorr^® Auto Regenerable Nitrogen Gas Purifiers

These PS8 bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Uses dual adsorption processes designed specifically to provide ultra-high purity gas for semiconductor applications
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
Adsorber regeneration is accomplished by back flushing with a mixture of purified process gas and low concentration hydrogen (H₂) at an elevated temperature
Optimized design provides sub-ppb performance in small footprints with flow rates up to 833,333 slpm (50,000 Nm³/hr)

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Applications MegaTorr^® Auto Regenerable Nitrogen Gas Purifiers Applications

	Dimensions
Model	H (cm)	W (cm)	D (cm)	Weight (kg)
PS8-MGS10 - PS8-MGS40	138	80	40	< 110
PS8-MGS50 - PS8-MGS60	168	87	61	< 180
PS8-MGS90 - PS8-MGS120	165	100	70	< 300
PS8-MGT200 - PS8-MGT300	193	132	135	< 1,500
PS8-MGT400 - PS8-MGT600	211	148	196	< 2,300
PS8-MGT700 - PS8-MGT1000	209	191	236	< 2,300
PS8-MGT1200 - PS8-MGT3000	265	252	262	< 5,500
PS8-MGT4000 - PS8-MGT10000	267	252	467	< 25,500
> PS8-MGT10000	Models available. Contact Entegris for details.

Product Specifications

Gas purified	N₂
Impurities removed	H₂O, O₂, CO, CO₂, H₂< 1 ppb
Flow rates	Nm³/hr	slpm
PS8-MGS10 - PS8-MGS40	10 - 40	167 - 667
PS8-MGS50 - PS8-MGS60	50 - 60	833 - 1,000
PS8-MGS90 - PS8-MGS120	90 - 120	1,500 - 2,000
PS8-MGT200 - PS8-MGT300	200 - 300	3,333 - 5,000
PS8-MGT400 - PS8-MGT600	400 - 600	6,667 - 10,000
PS8-MGT700 - PS8-MGT1000	700 - 1,000	11,667 - 16,667
PS8-MGT1200 - PS8-MGT3000	1,200 - 3,000	20,000 - 50,000
PS8-MGT4000 - PS8-MGT10000	4,000 - 10,000	66,667 - 166,667
Maximum pressure drop	< 0.7 bar (70 kPa) < 1 bar (100 kPa), PS8-MGT4000-PS8-MGT10000 only
Note:	Purifiers are gas specific and should only be used for the gas indicated

Standard Features	Optional Features
Automated microprocessor controller HMI (Human Machine Interface) System alarms Electric gas preheaters Closed-loop temperature controls All-metal cabinet wih doors Hydrogen blending station High-temperature hardware interlock Over-pressurization safety relief system	Inlet and outlet isolation valves Mass flowmeter with 4-20 mA output Inlet and outlet pressure transducers Instrument air management system Auto or manual bypass Ultrafine 0.003 µm particle filter Separate control power Factory regenerable or automatically regenerable purifier in the bypass line

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MegaTorr® Auto Regenerable Nitrogen Gas Purifiers