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MegaTorr® Auto Regenerable Nitrogen Gas Purifiers
Interested in MegaTorr® Auto Regenerable Nitrogen Gas Purifiers?
Contact your Entegris account manager or
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Reference Materials
Applications
- Purifies N2 gas for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS8-MGS10 - PS8-MGS40 | 138 | 80 | 40 | < 110 |
PS8-MGS50 - PS8-MGS60 | 168 | 87 | 61 | < 180 |
PS8-MGS90 - PS8-MGS120 | 165 | 100 | 70 | < 300 |
PS8-MGT200 - PS8-MGT300 | 193 | 132 | 135 | < 1,500 |
PS8-MGT400 - PS8-MGT600 | 211 | 148 | 196 | < 2,300 |
PS8-MGT700 - PS8-MGT1000 | 209 | 191 | 236 | < 2,300 |
PS8-MGT1200 - PS8-MGT3000 | 265 | 252 | 262 | < 5,500 |
PS8-MGT4000 - PS8-MGT10000 | 267 | 252 | 467 | < 25,500 |
> PS8-MGT10000 | Models available. Contact Entegris for details. |
Gas purified | N2 | ||
Impurities removed | H2O, O2, CO, CO2, H2 < 1 ppb | ||
Flow rates | Nm3/hr | slpm | |
PS8-MGS10 - PS8-MGS40 | 10 - 40 | 167 - 667 | |
PS8-MGS50 - PS8-MGS60 | 50 - 60 | 833 - 1,000 | |
PS8-MGS90 - PS8-MGS120 | 90 - 120 | 1,500 - 2,000 | |
PS8-MGT200 - PS8-MGT300 | 200 - 300 | 3,333 - 5,000 | |
PS8-MGT400 - PS8-MGT600 | 400 - 600 | 6,667 - 10,000 | |
PS8-MGT700 - PS8-MGT1000 | 700 - 1,000 | 11,667 - 16,667 | |
PS8-MGT1200 - PS8-MGT3000 | 1,200 - 3,000 | 20,000 - 50,000 | |
PS8-MGT4000 - PS8-MGT10000 | 4,000 - 10,000 | 66,667 - 166,667 | |
Maximum pressure drop | < 0.7 bar (70 kPa) < 1 bar (100 kPa), PS8-MGT4000-PS8-MGT10000 only | ||
Note: | Purifiers are gas specific and should only be used for the gas indicated |
Standard Features | Optional Features |
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Outdoor Enclosure Options (OPAL)
For outdoor installation, see our outdoor enclosure options
Factory Regenerable Bulk Gas Purifiers (PS14)
- Ambient temperature weld gas or temporary purification
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