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Eximor® SV5 Filter

Provides superior contaminant retention capabilities and rapid start-up performance in sub-20 nm technology nodes.

  • Exclusively designed for use on TEL LITHIUS Pro™ series clean tracks
  • Advanced clean, point-of-use filter designed for NTD and RRC solvents
  • Unique PTFE-based membrane provides superior removal efficiency and reduces on-wafer defectivity, improving process yield
  • All PTFE filter construction enhances product cleanliness and solvent filtration efficiency while providing broad chemical compatibility
  • Read More Read Less
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