Impact® 8G Filter
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- EUV, ArF-i/D, KrF photoresists
- SOG, SOC
- Emerging chemistries
- Solvents
Specifications
Materials | Membrane | 8G, 8G-L | Azora™, UPE, Nylon, Duo, PCM* | |
8G UCP, 8G-L UCP | UPE, Nylon, Duo (UPE/Nylon) | |||
Supports, core, shell | HDPE | |||
O-ring | Kalrez® perfluoroelastomer (OF) | |||
Surface area | 8G | Azora G1 | 1200 cm² (1.29 ft²) | |
Azora G2 | 1500 cm2 (1.61 ft2) | |||
8G, 8G UCP | UPE | 1200 cm2 (1.29 ft2) | ||
8G, 8G UCP | Nylon | 800 cm2 (0.86 ft2) | ||
8G, 8G UCP | Duo | 800 cm2 (0.86 ft2) | ||
8G | PCM | 1300 cm2 (1.40 ft2) | ||
8G-L | Azora G2 | 3000 cm2 (3.23 ft2) | ||
8G-L, 8G-L UCP | UPE | 2400 cm2 (2.58 ft2) | ||
8G-L | Nylon | 1600 cm2 (1.72 ft2) | ||
8G-L, 8G-L UCP | Duo | 1600 cm2 (1.72 ft2) | ||
8G-L, 8G-L UCP | PCM | 2600 cm2 (2.80 ft2) | ||
Retention rating | Azora | Standard: None | UC: None | UCZ: G1, G2 |
UPE | Standard: 3, 5, 10, 20 nm, Oktolex G1 | UC: None | UCP: 1, 3, 5, 10 nm | |
Nylon | Standard: 10, 20 nm | UC: 10 nm | UCP: 5, 20 nm | |
Duo | Standard: 5, 10 nm | UC: None | UCP: 1, 3, 5, 10 nm | |
PCM* | Standard: 10 nm | UC: None | UCP: None | |
Maximum operating conditions | Maximum inlet pressure: | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | ||
Maximum forward/reverse differential pressure: | 0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) | |||
Maximum operating temperature: | 40°C (104°F) | |||
Hold up volume | Impact 8G, 8G UCP | 55 cc | ||
Impact 8G-L, 8G-L UCP | 110 cc | |||
Compatibility | PGMEA, PGME, and other photochemical solvents (contact your local Entegris applications engineer for details) | |||
Wettability | Spontaneously wets in butyl acetate, PGMEA, PGME, and other photochemical solvents. | |||
Fittings (uses Impact 2 Manifold) |
Refer to dimensional drawings | |||
*PCM: surface-modified hydrophilic UPE | ||||
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). |
Successfully Opted for software Updates
Impact 8G Photochemical Filter Technology Overview
Part Number | Lithography Technology | Filter Cleaning | Membrane/Media | Form Factor | O-ring | Retention Rating |
---|---|---|---|---|---|---|
A2AXC0M01 | ArF | Standard | UPE | Short Capsule | OM (On Manifold) | 20 nm |
A2AXC0MK1 | ArF | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2AXCLM01 | ArF | Standard | UPE | Long Capsule | OM (On Manifold) | 20 nm |
A2AXCLMK1 | ArF | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2CFC0MK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2CFCLM01UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OM (On Manifold) | 5 nm |
A2CFCLMK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2CKCLM01UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OM (On Manifold) | 3 nm |
A2CKCLMK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2CTC0M01UCP | Immersion | Ultraclean Plus (UCP) | UPE | Short Capsule | OM (On Manifold) | 10 nm |
A2CTC0MK1UCP | Immersion | Ultraclean Plus (UCP) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2CTCLMK1UCP | Immersion | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DFC0001 | EUV, Other | Standard | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 5 nm |
A2DFC0001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 5 nm |
A2DFC00K1 | EUV, Other | Standard | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DFC00K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DFCL0K1 | EUV, Other | Standard | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DFCL0K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DKC0001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 3 nm |
A2DKC00K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2DKCL001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OM (On Manifold) | 3 nm |
A2DKCL0K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2DTC0001 | Immersion | Standard | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 10 nm |
A2DTC0001UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 10 nm |
A2DTC00K1 | Immersion | Standard | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTC00K1UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTCL0K1 | Immersion | Standard | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTCL0K1UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2MTC0M01 | Immersion | Standard | UPE PCM | Short Capsule | OM (On Manifold) | 10 nm |
A2MTC0MK1 | Immersion | Standard | UPE PCM | Short Capsule | On Manifold (OM) with Kalrez® | 10 nm |
A2MTCLM01 | Immersion | Standard | UPE PCM | Long Capsule | OM (On Manifold) | 10 nm |
A2MTCLMK1 | Immersion | Standard | UPE PCM | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NTC0001 | Immersion | Standard | Nylon | Short Capsule | OM (On Manifold) | 10 nm |
A2NTC00K1 | Immersion | Standard | Nylon | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NTCL0K1 | Immersion | Standard | Nylon | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NXC0001 | ArF | Standard | Nylon | Short Capsule | OM (On Manifold) | 20 nm |
A2NXC00K1 | ArF | Standard | Nylon | Short Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2NXCL001 | ArF | Standard | Nylon | Long Capsule | OM (On Manifold) | 20 nm |
A2NXCL0K1 | ArF | Standard | Nylon | Long Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2SFC0M01 | EUV, Other | Standard | UPE | Short Capsule | OM (On Manifold) | 5 nm |
A2SFC0MK1 | EUV, Other | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SFC0MKTUC | EUV, Other | Ultraclean (UC) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SFCLM01 | EUV, Other | Standard | UPE | Long Capsule | OM (On Manifold) | 5 nm |
A2SFCLMK1 | EUV, Other | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SKC0M01 | EUV, Other | Standard | UPE | Short Capsule | OM (On Manifold) | 3 nm |
A2SKC0MK1 | EUV, Other | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2SKCLM01 | EUV, Other | Standard | UPE | Long Capsule | OM (On Manifold) | 3 nm |
A2SKCLMK1 | EUV, Other | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2STC0M01 | Immersion | Standard | UPE | Short Capsule | OM (On Manifold) | 10 nm |
A2STC0MK1 | Immersion | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2STCLM01 | Immersion | Standard | UPE | Long Capsule | OM (On Manifold) | 10 nm |
A2STCLMK1 | Immersion | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |