Impact® 8G Filter
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Reference Materials
CAD
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Applications
- EUV, ArF-i/D, KrF photoresists
- SOG, SOC
- Emerging chemistries
- Solvents
Specifications
| Materials | Membrane | 8G, 8G-L | Azora™, UPE, Nylon, Duo | |
| 8G UCP, 8G-L UCP | UPE, Nylon, Duo (UPE/Nylon) | |||
| Supports, core, shell | HDPE | |||
| O-ring | Perfluoroelastomer (OF) | |||
| Surface area | 8G | Azora G1 | 1200 cm² (1.29 ft²) | |
| Azora G2 | 1500 cm2 (1.61 ft2) | |||
| 8G, 8G UCP | UPE | 1200 cm2 (1.29 ft2) | ||
| 8G, 8G UCP | Nylon | 800 cm2 (0.86 ft2) | ||
| 8G, 8G UCP | Duo | 800 cm2 (0.86 ft2) | ||
| 8G-L | Azora G2 | 3000 cm2 (3.23 ft2) | ||
| 8G-L, 8G-L UCP | UPE | 2400 cm2 (2.58 ft2) | ||
| 8G-L | Nylon | 1600 cm2 (1.72 ft2) | ||
| 8G-L, 8G-L UCP | Duo | 1600 cm2 (1.72 ft2) | ||
| Retention rating | Azora | Standard: None | UC: None | UCZ: G1, G2 |
| UPE | Standard: 3, 5, 10, 20 nm, Oktolex G1 | UC: None | UCP: 1, 3, 5, 10 nm | |
| Nylon | Standard: 10, 20 nm | UC: 10 nm | UCP: 5, 20 nm | |
| Duo | Standard: 5, 10 nm | UC: None | UCP: 1, 3, 5, 10 nm | |
| Maximum operating conditions | Maximum inlet pressure: | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | ||
| Maximum forward/reverse differential pressure: | 0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) | |||
| Maximum operating temperature: | 40°C (104°F) | |||
| Hold up volume | Impact 8G, 8G UCP | 55 cc | ||
| Impact 8G-L, 8G-L UCP | 110 cc | |||
| Compatibility | Visit our Chemical Compatibility web page | |||
| Wettability | Spontaneously wets in PGMEA, PGME, and other photochemical solvents. | |||
| Fittings | Impact 2 filter manifold | |||
| Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date). | ||||
Successfully Opted for software Updates
Published Mar 1, 2018
Technical Note
Reduced Defectivity Rates Using Oktolex™ Membrane Technology in Photochemical Filtration Applications
710.5 kB
Impact 8G Photochemical Filter Technology Overview
Part Numbers
| Part Number | Filter Cleaning | Membrane/Media | Form Factor | Retention Rating | Prewet |
|---|---|---|---|---|---|
| A2AXC0MK1 | Standard | UPE | Short Capsule | 20 nm | No |
| A2AXCLMK1 | Standard | UPE | Long Capsule | 20 nm | No |
| A2CEC0MK1UCP | Ultraclean Plus (UCP) | UPE | Short Capsule | 1 nm | No |
| A2CFC0MK1UCP | Ultraclean Plus (UCP) | UPE | Short Capsule | 5 nm | No |
| A2CFCLMK1UCP | Ultraclean Plus (UCP) | UPE | Long Capsule | 5 nm | No |
| A2CKC0MK1UCP | Ultraclean Plus (UCP) | UPE | Short Capsule | 3 nm | No |
| A2CKCLMK1UCP | Ultraclean Plus (UCP) | UPE | Long Capsule | 3 nm | No |
| A2CTC0MK1UCP | Ultraclean Plus (UCP) | UPE | Short Capsule | 10 nm | No |
| A2CTCLMK1UCP | Ultraclean Plus (UCP) | UPE | Long Capsule | 10 nm | No |
| A2DE100K1UCP | Ultraclean Plus (UCP) | DUO | Short Capsule | 1 nm | No |
| A2DE1L0K1UCP | Ultraclean Plus (UCP) | DUO | Long Capsule | 1 nm | No |
| A2DFC00K1 | Standard | DUO | Short Capsule | 5 nm | No |
| A2DFC00K1UCP | Ultraclean Plus (UCP) | DUO | Short Capsule | 5 nm | No |
| A2DFCL0K1UCP | Ultraclean Plus (UCP) | DUO | Long Capsule | 5 nm | No |
| A2DKC00K1UCP | Ultraclean Plus (UCP) | DUO | Short Capsule | 3 nm | No |
| A2DKCL0K1UCP | Ultraclean Plus (UCP) | DUO | Long Capsule | 3 nm | No |
| A2DTC00K1UCP | Ultraclean Plus (UCP) | DUO | Short Capsule | 10 nm | No |
| A2DTCL0K1 | Standard | DUO | Long Capsule | 10 nm | No |
| A2DTCL0K1UCP | Ultraclean Plus (UCP) | DUO | Long Capsule | 10 nm | No |
| A2NTC00K1 | Standard | Nylon | Short Capsule | 10 nm | No |
| A2NTC00K1UC | Ultraclean (UC) | Nylon | Short Capsule | 10 nm | No |
| A2NTCL0K1 | Standard | Nylon | Long Capsule | 10 nm | No |
| A2NTCL0K1UC | Ultraclean (UC) | Nylon | Long Capsule | 10 nm | No |
| A2NXC00K1 | Standard | Nylon | Short Capsule | 20 nm | No |
| A2NXC00K1UCP | Ultraclean Plus (UCP) | Nylon | Short Capsule | 20 nm | No |
| A2NXCL0K1 | Standard | Nylon | Long Capsule | 20 nm | No |
| A2NXCL0K1UCP | Ultraclean Plus (UCP) | Nylon | Long Capsule | 20 nm | No |
| A2SFC0MK1 | Standard | UPE | Short Capsule | 5 nm | No |
| A2SFCLMK1 | Standard | UPE | Long Capsule | 5 nm | No |
| A2SKC0MK1 | Standard | UPE | Short Capsule | 3 nm | No |
| A2SKCLMK1 | Standard | UPE | Long Capsule | 3 nm | No |
| A2SKCLMK1PW | Standard | UPE | Long Capsule | 3 nm | Yes (DI water) |
| A2STC0MK1 | Standard | UPE | Short Capsule | 10 nm | No |
| A2STCLMK1 | Standard | UPE | Long Capsule | 10 nm | No |
| S4440R136Y18 | Standard | UPE Oktolex™ | Long Capsule | G1 | No |
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