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Impact® 8G Filter
To discuss your specific needs, contact your local Entegris representative.
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- EUV, ArF-i/D, KrF photoresists
- SOG, SOC
- Emerging chemistries
- Solvents
Specifications
Materials | Membrane | 8G, 8G-L | Azora™, UPE, Nylon, Duo, PCM* | |
8G UCP, 8G-L UCP | UPE, Nylon, Duo (UPE/Nylon) | |||
Supports, core, shell | HDPE | |||
O-ring | Kalrez® perfluoroelastomer (OF) | |||
Membrane area | 8G | Azora G1 | 1200 cm² (1.29 ft²) | |
Azora G2 | 1500 cm2 (1.61 ft2) | |||
8G, 8G UCP | UPE | 1200 cm2 (1.29 ft2) | ||
8G, 8G UCP | Nylon | 800 cm2 (0.86 ft2) | ||
8G, 8G UCP | Duo | 800 cm2 (0.86 ft2) | ||
8G | PCM | 1300 cm2 (1.40 ft2) | ||
8G-L | Azora G2 | 3000 cm2 (3.23 ft2) | ||
8G-L, 8G-L UCP | UPE | 2400 cm2 (2.58 ft2) | ||
8G-L | Nylon | 1600 cm2 (1.72 ft2) | ||
8G-L, 8G-L UCP | Duo | 1600 cm2 (1.72 ft2) | ||
8G-L, 8G-L UCP | PCM | 2600 cm2 (2.80 ft2) | ||
Retention rating | Azora | Standard: None | UC: None | UCZ: G1, G2 |
UPE | Standard: 3, 5, 10, 20 nm, Oktolex G1-5 | UC: None | UCP: 1, 3, 5, 10 nm | |
Nylon | Standard: 10, 20 nm | UC: 10 nm | UCP: 5, 20 nm | |
Duo | Standard: 5, 10 nm | UC: None | UCP: 1, 3, 5, 10 nm | |
PCM* | Standard: 10 nm | UC: None | UCP: None | |
Maximum operating conditions | Maximum inlet pressure: | 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) | ||
Maximum forward/reverse differential pressure: | 0.27 MPa (2.7 bar, 39 psi) @ 25°C (77°F) | |||
Maximum operating temperature: | 40°C (104°F) | |||
Hold up volume | Impact 8G, 8G UCP | 55 cc | ||
Impact 8G-L, 8G-L UCP | 110 cc | |||
Compatibility | PGMEA, PGME, and other photochemical solvents (contact your local Entegris applications engineer for details) | |||
Wettability | Spontaneously wets in butyl acetate, PGMEA, PGME, and other photochemical solvents. | |||
Fittings (uses Impact 2 Manifold) |
Refer to dimensional drawings | |||
*PCM: surface-modified hydrophilic UPE |
Note: The flushing shell is designed for short-term use in flushing chemical lines and systems; the warranty will be voided when the product is used in lieu of a filtration device or is subjected to long-term exposure to solvents in a pressurized environment.
Successfully Opted for software Updates
Impact 8G Photochemical Filter Technology Overview
Part Number | Lithography Technology | Filter Cleaning | Membrane/Media | Form Factor | O-ring | Retention Rating |
---|---|---|---|---|---|---|
A2AXC0M01 | ArF | Standard | UPE | Short Capsule | OM (On Manifold) | 20 nm |
A2AXC0MK1 | ArF | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2AXCLM01 | ArF | Standard | UPE | Long Capsule | OM (On Manifold) | 20 nm |
A2AXCLMK1 | ArF | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2CFC0MK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2CFCLM01UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OM (On Manifold) | 5 nm |
A2CFCLMK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2CKCLM01UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OM (On Manifold) | 3 nm |
A2CKCLMK1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2CTC0M01UCP | Immersion | Ultraclean Plus (UCP) | UPE | Short Capsule | OM (On Manifold) | 10 nm |
A2CTC0MK1UCP | Immersion | Ultraclean Plus (UCP) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2CTCLMK1UCP | Immersion | Ultraclean Plus (UCP) | UPE | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DFC0001 | EUV, Other | Standard | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 5 nm |
A2DFC0001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 5 nm |
A2DFC00K1 | EUV, Other | Standard | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DFC00K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | On Manifold (OM) with Kalrez® | 5 nm |
A2DFCL0K1 | EUV, Other | Standard | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DFCL0K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2DKC0001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 3 nm |
A2DKC00K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | On Manifold (OM) with Kalrez® | 3 nm |
A2DKCL001UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OM (On Manifold) | 3 nm |
A2DKCL0K1UCP | EUV, Other | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2DTC0001 | Immersion | Standard | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 10 nm |
A2DTC0001UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OM (On Manifold) | 10 nm |
A2DTC00K1 | Immersion | Standard | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTC00K1UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTCL0K1 | Immersion | Standard | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2DTCL0K1UCP | Immersion | Ultraclean Plus (UCP) | UPE/Nylon (DUO) | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2MTC0M01 | Immersion | Standard | UPE PCM | Short Capsule | OM (On Manifold) | 10 nm |
A2MTC0MK1 | Immersion | Standard | UPE PCM | Short Capsule | On Manifold (OM) with Kalrez® | 10 nm |
A2MTCLM01 | Immersion | Standard | UPE PCM | Long Capsule | OM (On Manifold) | 10 nm |
A2MTCLMK1 | Immersion | Standard | UPE PCM | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NTC0001 | Immersion | Standard | Nylon | Short Capsule | OM (On Manifold) | 10 nm |
A2NTC00K1 | Immersion | Standard | Nylon | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NTCL0K1 | Immersion | Standard | Nylon | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2NXC0001 | ArF | Standard | Nylon | Short Capsule | OM (On Manifold) | 20 nm |
A2NXC00K1 | ArF | Standard | Nylon | Short Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2NXCL001 | ArF | Standard | Nylon | Long Capsule | OM (On Manifold) | 20 nm |
A2NXCL0K1 | ArF | Standard | Nylon | Long Capsule | OF (On Filter) with Kalrez® | 20 nm |
A2SFC0M01 | EUV, Other | Standard | UPE | Short Capsule | OM (On Manifold) | 5 nm |
A2SFC0MK1 | EUV, Other | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SFC0MKTUC | EUV, Other | Ultraclean (UC) | UPE | Short Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SFCLM01 | EUV, Other | Standard | UPE | Long Capsule | OM (On Manifold) | 5 nm |
A2SFCLMK1 | EUV, Other | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 5 nm |
A2SKC0M01 | EUV, Other | Standard | UPE | Short Capsule | OM (On Manifold) | 3 nm |
A2SKC0MK1 | EUV, Other | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2SKCLM01 | EUV, Other | Standard | UPE | Long Capsule | OM (On Manifold) | 3 nm |
A2SKCLMK1 | EUV, Other | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 3 nm |
A2STC0M01 | Immersion | Standard | UPE | Short Capsule | OM (On Manifold) | 10 nm |
A2STC0MK1 | Immersion | Standard | UPE | Short Capsule | OF (On Filter) with Kalrez® | 10 nm |
A2STCLM01 | Immersion | Standard | UPE | Long Capsule | OM (On Manifold) | 10 nm |
A2STCLMK1 | Immersion | Standard | UPE | Long Capsule | OF (On Filter) with Kalrez® | 10 nm |