Impact® 8G Flushing Shell
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- Industry: Semiconductor
- Process: Photolithography
- Chemistry: Photoresist, Photochemicals, Solvents
- Installation Point: Point of Tool
Specifications
Hold-up volume | 1 mL |
Material | HDPE |
Internal surface area | 1.4 cm² (0.22 in²) |
Operating conditions | Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 psi) @ 25°C (77°F) Maximum temperature: 40°C (104°F) |
Note: The flushing shell is designed for short-term use (less than 1 month) in flushing chemical lines and systems. | |
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Part Number | Hold Up Volume | O-ring |
---|---|---|
A2AMC00K1 | 1 mL | OF (On Filter) with Kalrez® |