Microgard™ Advanced Nylon Filters

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With a choice of cleaning technologies available, these advanced nylon filters meet the critical pre-filtration demands in various bulk photochemical applications.

Nylon membrane has higher removal efficiency of metal and other contaminants, providing better on-wafer defect performance
Utilizing the latest nylon cleaning process lowers levels of organic and metal extractables, and particle shedding
The optimized membrane morphology with retention rating to 5 nm enables high flow rate with no significant impact on productivity

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Applications Microgard™ Advanced Nylon Filters Applications

Our cleaning technologies are designed to further reduce particle shedding and metal and organic extractables in various photochemical applications in both logic and DRAM manufacturing.

Photoresist
Solvents
Other ancillary chemicals

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Performance Data

Product Specifications

Materials of construction	Membrane	Nylon (polyamide)
	Supports, core, sleeve	HDPE
	O-ring	E-FKM or Kalrez^® (AS568-222)
		Standard clean	Ultraclean	Ultraclean Plus
Surface area	20" Ø70 mm	20 nm, 10 nm: 1.4 m²	20 nm, 10 nm: 1.64 m²	5 nm: 1.64 m²
	20" Ø83 mm	20 nm: 2.0 m²	20 nm, 10 nm: 2.62 m²	–
	10" Ø70 mm	20 nm, 10 nm, 5 nm: 0.71 m²	20 nm, 10 nm: 0.82 m²	5 nm: 0.82 m²
	10", Ø83 mm	20 nm, 10 nm: 1.0 m²	20 nm, 10 nm: 1.31 m²	–
	Disposable	20 nm, 10 nm: 0.14 m²	20 nm, 10 nm: 0.14m²	5 nm: 0.17 m²

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Reference Materials Product Documentation

Published Oct 26, 2022 Data Sheet Microgard™ Advanced Nylon Filters

916.9 kB

Published Oct 26, 2022 Data Sheet Microgard™ Advanced Nylon Filters - A4

917.0 kB

Part Numbers

Microgard™ Advanced Nylon Filters Part Numbers

Part Number	Product Type	Pore Size Rating	Length	Diameter	Filter Cleaning
CWNF01PNTUCP	Cartridge filter	5 nm	10"	70 mm	Ultraclean Plus (UCP)
CWNF01PST	Cartridge filter	5 nm	10"	70 mm	Standard
CWNF02PNTUCP	Cartridge filter	5 nm	20"	70 mm	Ultraclean Plus (UCP)
CWNF0S2S1UCP	Small disposable filter	5 nm	N/A	N/A	Ultraclean Plus (UCP)
CWNT01PNTUC	Cartridge filter	10 nm	10"	70 mm	Ultraclean (UC)
CWNT01PST	Cartridge filter	10 nm	10"	70 mm	Standard
CWNT01XNKUC	Cartridge filter	10 nm	10"	83 mm	Ultraclean (UC)
CWNT01XST	Cartridge filter	10 nm	10"	83 mm	Standard
CWNT02PNTUC	Cartridge filter	10 nm	20"	70 mm	Ultraclean (UC)
CWNT02PST	Cartridge filter	10 nm	20"	70 mm	Standard
CWNT02XNKUC	Cartridge filter	10 nm	20"	83 mm	Ultraclean (UC)
CWNT03PST	Cartridge filter	10 nm	30"	70 mm	Standard
CWNT0S2S1UC	Small disposable filter	10 nm	N/A	N/A	Ultraclean (UC)
CWNT0S2S3	Small disposable filter	10 nm	N/A	N/A	Standard
CWNX01PNTUC	Cartridge filter	20 nm	10"	70 mm	Ultraclean (UC)
CWNX01PNTUCP	Cartridge filter	20 nm	10"	70 mm	Ultraclean Plus (UCP)
CWNX01PST	Cartridge filter	20 nm	10"	70 mm	Standard
CWNX01XNKUC	Cartridge filter	20 nm	10"	83 mm	Ultraclean (UC)
CWNX01XST	Cartridge filter	20 nm	10"	83 mm	Standard
CWNX02PNTUC	Cartridge filter	20 nm	20"	70 mm	Ultraclean (UC)
CWNX02PST	Cartridge filter	20 nm	20"	70 mm	Standard
CWNX02XNKUC	Cartridge filter	20 nm	20"	83 mm	Ultraclean (UC)
CWNX02XST	Cartridge filter	20 nm	20"	83 mm	Standard
CWNX0S2S1UC	Small disposable filter	20 nm	N/A	N/A	Ultraclean (UC)
CWNX0S2S1UCP	Small disposable filter	20 nm	N/A	N/A	Ultraclean Plus (UCP)
CWNX0S2S3	Small disposable filter	20 nm	N/A	N/A	Standard