Microgard™ Advanced Nylon Filters
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CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
Our cleaning technologies are designed to further reduce particle shedding and metal and organic extractables in various photochemical applications in both logic and DRAM manufacturing.
- Photoresist
- Solvents
- Other ancillary chemicals
Specifications
| Materials of construction | Membrane | Nylon (polyamide) | ||
| Supports, core, sleeve | HDPE | |||
| O-ring | E-FKM or Kalrez® (AS568-222) | |||
| Standard clean | Ultraclean | Ultraclean Plus | ||
| Surface area | 20" Ø70 mm | 20 nm, 10 nm: 1.4 m2 | 20 nm, 10 nm: 1.64 m2 | 5 nm: 1.64 m2 |
| 20" Ø83 mm | 20 nm: 2.0 m2 | 20 nm, 10 nm: 2.62 m2 | – | |
| 10" Ø70 mm | 20 nm, 10 nm, 5 nm: 0.71 m2 | 20 nm, 10 nm: 0.82 m2 | 5 nm: 0.82 m2 | |
| 10", Ø83 mm | 20 nm, 10 nm: 1.0 m2 | 20 nm, 10 nm: 1.31 m2 | – | |
| Disposable | 20 nm, 10 nm: 0.14 m2 | 20 nm, 10 nm: 0.14m2 | 5 nm: 0.17 m2 | |
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Part Numbers
| Part Number | Product Type | Pore Size Rating | Length | Diameter | Filter Cleaning |
|---|---|---|---|---|---|
| CWNF01PNTUCP | Cartridge filter | 5 nm | 10" | 70 mm | Ultraclean Plus (UCP) |
| CWNF01PST | Cartridge filter | 5 nm | 10" | 70 mm | Standard |
| CWNF02PNTUCP | Cartridge filter | 5 nm | 20" | 70 mm | Ultraclean Plus (UCP) |
| CWNF0S2S1UCP | Small disposable filter | 5 nm | N/A | N/A | Ultraclean Plus (UCP) |
| CWNT01PNTUC | Cartridge filter | 10 nm | 10" | 70 mm | Ultraclean (UC) |
| CWNT01PST | Cartridge filter | 10 nm | 10" | 70 mm | Standard |
| CWNT01XNKUC | Cartridge filter | 10 nm | 10" | 83 mm | Ultraclean (UC) |
| CWNT01XST | Cartridge filter | 10 nm | 10" | 83 mm | Standard |
| CWNT02PNTUC | Cartridge filter | 10 nm | 20" | 70 mm | Ultraclean (UC) |
| CWNT02PST | Cartridge filter | 10 nm | 20" | 70 mm | Standard |
| CWNT02XNKUC | Cartridge filter | 10 nm | 20" | 83 mm | Ultraclean (UC) |
| CWNT03PST | Cartridge filter | 10 nm | 30" | 70 mm | Standard |
| CWNT0S2S1UC | Small disposable filter | 10 nm | N/A | N/A | Ultraclean (UC) |
| CWNT0S2S3 | Small disposable filter | 10 nm | N/A | N/A | Standard |
| CWNX01PNTUC | Cartridge filter | 20 nm | 10" | 70 mm | Ultraclean (UC) |
| CWNX01PNTUCP | Cartridge filter | 20 nm | 10" | 70 mm | Ultraclean Plus (UCP) |
| CWNX01PST | Cartridge filter | 20 nm | 10" | 70 mm | Standard |
| CWNX01XNKUC | Cartridge filter | 20 nm | 10" | 83 mm | Ultraclean (UC) |
| CWNX01XST | Cartridge filter | 20 nm | 10" | 83 mm | Standard |
| CWNX02PNTUC | Cartridge filter | 20 nm | 20" | 70 mm | Ultraclean (UC) |
| CWNX02PST | Cartridge filter | 20 nm | 20" | 70 mm | Standard |
| CWNX02XNKUC | Cartridge filter | 20 nm | 20" | 83 mm | Ultraclean (UC) |
| CWNX02XST | Cartridge filter | 20 nm | 20" | 83 mm | Standard |
| CWNX0S2S1UC | Small disposable filter | 20 nm | N/A | N/A | Ultraclean (UC) |
| CWNX0S2S1UCP | Small disposable filter | 20 nm | N/A | N/A | Ultraclean Plus (UCP) |
| CWNX0S2S3 | Small disposable filter | 20 nm | N/A | N/A | Standard |