Contact Us
Careers
Language
Choose Language
- English
- 日本語
Currency
Choose Currency
- CNY ¥
- EUR €
- GBP £
- ILS ₪
- JPY ¥
- KRW ₩
- SGD $
- TWD NT$
- USD $
Search

Search

Product Search Results

Content Search Results

Optimizer® ST Filter

Download Image

Optimizer^® point-of-use (POU) DI water and photochemical solvent filters deliver high-purity filtration to photolithography processes.

Provide higher flow rate and strong retention rate performance in all technology nodes
Use our Connectology^® technology to quickly connect and seal with compatible manifolds
Easy to install or retrofit, the compact design saves space and enables faster startup with minimal exposure to process chemicals
The filter, with pleated UPE membrane, achieves maximum flow with minimal risk of contamination

Read More Read Less

Specify Your Part

Membrane/Media

Retention Rating

Length

O-ring

Diameter

Filter Cleaning

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly.

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country/region

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

Company Address

You are required to accept the Captcha.

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Applications Optimizer® ST Filter Applications

Industry: Semiconductor
Process: Photolithography, Chemical Manufacturing
Chemistry: Photochemical, Solvent
Installation Point: Point of Tool

Specifications

Drawings

	ST (short type)	ST-L (long type)
L1	108.0 mm (4.25")	162.0 mm (6.37")
L2	87.0 mm (3.42")	137.0 mm (5.39")

Performance Data

Product Specifications

Optimizer ST UPE Filter
Materials	Membrane	UPE
	Supports	HDPE
	Housing, core, sleeve	PP
	O-ring	Perfluoroelastomer
Retention rating and membrane area	ST	3 nm, 5 nm, 10 nm	2200 cm² (2.37 ft²)
		0.05 µm, 0.1 µm	2200 cm² (2.37 ft²)
		20 nm	2600 cm² (2.80 ft²)
	ST-L	3 nm	4000 cm² (4.31 ft²)
		5 nm	4300 cm² (4.63 ft²)
		10 nm, 20 nm	4500 cm² (4.84 ft²)
		0.05 µm	3900 cm² (4.20 ft²)
	ST-LX	3 nm, 5 nm	6300 cm² (6.78 ft²)
		1.0 µm	5200 cm² (5.60 ft²)
Manifold	Optimizer ST2 Manifold
Operating conditions	Maximum inlet pressure	0.39 MPa (3.9 bar, 57 psi) @ 25°C (77°F)
	Maximum forward/reverse differential pressure	0.28 MPa (2.8 bar, 40 psi) @ 25°C (77°F)
	Operating temperature	40°C (104°F)
Compatibility	Visit our Chemical Compatibility web page
Unassembled accessories	One-piece molded PE cap** for IN, OUT, and VENT (1 ea.)
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date).

Optimizer ST DEV Filter
Materials	Membrane	DEV (Hydrophilic UPE*)
	Supports	HDPE
	Housing, core, sleeve	PP
	O-ring	Perfluoroelastomer
Retention rating and membrane area	ST DEV	0.05 µm, 0.1 µm	1600 cm² (1.72 ft²)
	ST-L DEV	30 nm (0.03 µm)	4500 cm² (4.84 ft²)
		0.05 µm, 1.0 µm	3000 cm² (3.23 ft²)
	ST-LX DEV	10 nm	6800 cm² (7.32 ft²)
		20 nm	6300 cm² (6.78 ft²)
Chemical compatibility	Contact your local Entegris applications engineer for details
Manifold	Optimizer ST2 Manifold
Operating conditions	Maximum inlet pressure	0.39 MPa (3.9 bar, 57 psi, 4.01 kg/cm²) @ 25°C (77°F)
	Maximum forward/reverse differential pressure	0.28 MPa (2.8 bar, 40 psi, 2.8 kg/cm²) @ 25°C (77°F)
	Operating temperature	40°C (104°F)
Unassembled accessories	One-piece molded PE cap** for IN, OUT, and VENT (1 ea.)
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date).

Optimizer ST DI and ST-L DI Filters
Materials	Membrane	DI (Hydrophobic UPE*)
	Supports	HDPE
	Housing, core, sleeve	PP
	O-ring	Perfluoroelastomer
Retention rating and membrane area	ST DI	0.05 µm, 0.1 µm, 0.2 µm	1800 cm² (1.94 ft²)
	ST-L DI	0.05 µm, 0.1 µm, 0.2 µm	3400 cm² (3.66 ft²)
Chemical compatibility	Contact your local Entegris applications engineer for details
Manifold	Optimizer ST2 Manifold
Operating conditions	Maximum inlet pressure	0.39 MPa (3.9 bar, 57 psi, 4.01 kg/cm²) @ 25°C (77°F)
	Maximum forward/reverse differential pressure	0.28 MPa (2.8 bar, 40 psi, 2.8 kg/cm²) @ 25°C (77°F)
Unassembled accessories	One-piece molded PE cap** for IN, OUT, and VENT (1 ea.)
Entegris recommends that customers change filters at least annually to ensure optimal filtration performance. Routine annual changeout will also reduce the potential of chemical leakage that can result from excessive usage. Our standard warranty period is 1 year (from Entegris ship date).

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Sep 1, 2022 Data Sheet Optimizer® Point-of-use Photochemical Filters

566.3 kB

Published Jul 1, 2022 Data Sheet Optimizer®AXC Photochemical Filters

210.9 kB

Published Apr 20, 2020 Data Sheet Optimizer® AUC Photochemical Filter

381.7 kB

Published Jul 1, 2021 Brochure Liquid Filtration Solutions

2.1 MB

Published Jul 1, 2021 Brochure Chasing the Perfect Pattern

1.4 MB

Part Numbers

Optimizer® ST Filter Part Numbers

Part Number	Membrane/Media	Retention Rating	Length	O-ring	Diameter	Filter Cleaning
ABUG0LKM1	UPE DI	0.2 µm	Long Capsule	Perfluoroelastomer	Standard	Standard
ABUV0LKM1	UPE DI	0.1 µm	Long Capsule	Perfluoroelastomer	Standard	Standard
ABUZ0LKM1	UPE DI	0.05 µm	Long Capsule	Perfluoroelastomer	Standard	Standard
ABUZ0SKM1	UPE DI	0.05 µm	Short Capsule	Perfluoroelastomer	Standard	Standard
AHUTMLKX1	UPE DEV	10 nm	Long Capsule	Perfluoroelastomer	Large	Standard
AHUTMLKX1UC	UPE DEV	10 nm	Long Capsule	Perfluoroelastomer	Large	Ultraclean (UC)
AMUA0LKX1	UPE - Thick, Symmetric	1 µm	Long Capsule	Perfluoroelastomer	Large	Standard
AWATMLKM1	UPE Hydrophobic	10 nm	Long Capsule	Perfluoroelastomer	Standard	Standard
AWAV0SKM1	UPE Hydrophobic	0.1 µm	Short Capsule	Perfluoroelastomer	Standard	Standard
AWAXMLKM1	UPE Hydrophobic	20 nm	Long Capsule	Perfluoroelastomer	Standard	Standard
AWAXMSKM1	UPE Hydrophobic	20 nm	Short Capsule	Perfluoroelastomer	Standard	Standard
AWAZ0LKM1	UPE Hydrophobic	0.05 µm	Long Capsule	Perfluoroelastomer	Standard	Standard
AWAZ0SKM1	UPE Hydrophobic	0.05 µm	Short Capsule	Perfluoroelastomer	Standard	Standard
AWCFMSKM1	UPE Hydrophobic	5 nm	Short Capsule	Perfluoroelastomer	Standard	Standard
AWCKMLKM1	UPE Hydrophobic	3 nm	Long Capsule	Perfluoroelastomer	Standard	Standard
AWSFMLKM1	UPE Hydrophobic	5 nm	Long Capsule	Perfluoroelastomer	Standard	Standard

Optimizer® ST Filter

Specifications

Optimizer ST UPE Filter

Optimizer ST DEV Filter

Optimizer ST DI and ST-L DI Filters