Optimizer® ST3 Filter Manifold
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- Photolithography
- Point-of-tool, photochemical and solvent applications
Specifications
Materials | Non-wetted components | Stainless steel |
Tube connectors, wetted surfaces | PFA | |
Release tab | Polyacetal | |
O-ring | N/A | |
Operating conditions | Maximum operating pressure: | 0.39 MPa (3.9 bar, 57 psi) @ 25°C (77°F) |
Maximum operating temperature: | 40°C (104°F) | |
Note: The Optimizer ST3 filter manifold is designed for use with Entegris filters and flushing shell only. The warranty will be voided if it is used with non-Entegris products. |
Successfully Opted for software Updates
Part Number | Fitting Type | Inlet/Outlet Fitting Size |
---|---|---|
AM3T22201 | Thin tube type | 1/4" |
AM3T33201 | Thin tube type | 3/8" |
AM3T44201 | Thin tube type | 1/2" |
AM3XL220T | Flowell® 60 elbow | 1/4" |
AM3XL320T | Flowell® 60 elbow | 3/8" |
AM3XL420T | Flowell® 60 elbow | 1/2" |
AM3ZL220T | Flowell® 80EZ elbow | 1/4" |
AM3ZL320T | Flowell® 80EZ elbow | 3/8" |
AM3ZL420T | Flowell® 80EZ elbow | 1/2" |