Pervasive Defectivity in Semiconductor Manufacturing
Most equipment and process engineers become experts at analyzing a wafer map to quickly identify signatures. They can easily identify when their equipment or process was the perpetrator of a maverick yield event. But as defect signatures become more subtle and harder to quickly identify, there is a significant need to consider not just what your in-line inspection systems are identifying, but specifically what they are not identifying.
There is a significant opportunity cost in chasing after weak signatures without ever identifying their root cause. It is now increasingly important to design equipment and processes to be contamination tolerant, providing a robust contamination management strategy to eliminate defects that negatively impact yield and long-term reliability for each process step.
Featured White Paper
Transitioning from Preventable to Pervasive Defectivity in Semiconductor Manufacturing
This white paper presents the need for material suppliers, equipment makers, fabs, and semiconductor customers to share insights to achieve the most effective, holistic contamination control performance that addresses both the defects we can see and those we have yet to see. This case-study approach will demonstrate solutions to contamination challenges that threaten wafer yield, IC performance, and device reliability.
Featured Animation
Pervasive Defectivity
This animation explains why handling pervasive defectivity will require coordinated thinking across the semiconductor value chain, and how Entegris is here to help. Runtime: 01:38.
Featured Pictogram
How (and Why) to Address Pervasive Defectivity
Pictorial explaining why we must think of defectivity as pervasive and why coordinated thinking across the value chain is needed to handle it.
Featured Video
Gas Signatures - Rocky Gipson
Rocky Gibson, research and development senior manager, Microcontamination Control, explains the behaviors, manufacturing method, and origins of gas signatures to understand the challenges they present and the solutions available.
Runtime: 1:50.
Featured Blog
Filtering Out the Noise: What You May Not Know About Everyday Purity
Whether it is a deliberate strategy or serendipity, the innovations that shape our lives are the result of skilled people put into the right environment to create something new. Innovation is not an exact science, but persistence and some good luck have yielded all the amazing tools and technology we rely upon.
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