CMP Slurries


Featured Information

The Silicon Precursor Toolbox for Low-temperature Deposition

Featured Information

The Silicon Precursor Toolbox for Low-temperature Deposition

Featured Information

The Silicon Precursor Toolbox for Low-temperature Deposition
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  • Industry
  • Process
High performance slurries for scalable polishing of hard materials (single and polycrystalline surfaces)
Industry
  • Semiconductor
  • Industrial
Process
  • CMP
High performance slurries for scalable manufacturing of atomically smooth and defect-free SiC (silicon carbide) wafers
Industry
  • Semiconductor
  • Industrial
Process
  • CMP
  • Lapping
High performance slurries for scalable manufacturing of atomically smooth and defect-free nitride surfaces
Industry
  • Semiconductor
  • Industrial
Process
  • CMP
  • Lapping
High performance slurries for scalable manufacturing of sapphire wafers
Industry
  • Semiconductor
  • Industrial
Process
  • CMP
  • Lapping
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