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MegaTorr® Cryogenic Hydrogen Gas Purifiers
Interested in MegaTorr® Cryogenic Hydrogen Gas Purifiers?
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Reference Materials
Applications
- Purifies H2 gas for semiconductor applications
Specifications
Dimensions
Dimensions | ||||
Model | H (cm) | W (cm) | D (cm) | Weight (kg) |
PS7-CR100 | 254 | 203 | 237 | < 2,720 |
PS7-CR200 | 254 | 203 | 237 | < 2,720 |
PS7-CR400 | 259 | 237 | 280 | < 3,175 |
PS7-CR800 | 280 | 254 | 411 | < 6,800 |
Gas purified | H2 | ||
Impurities removed | H2O, O2, CO, CO2, THC (including CH4), N2 < 1 ppb | ||
Maximum flow rates* | Nm3/hr | slpm | |
PS7-CR100 | 100 | 1,667 | |
PS7-CR200 | 200 | 3,333 | |
PS7-CR400 | 400 | 5,000 | |
PS7-CR800 | 800 | 13,333 | |
*Other flow rates are available. Contact Entegris for details. | |||
Maximum pressure drop | < 0.7 bar (70 kPa) | ||
Note: | Purifiers are gas specific and should only be used for the gas indicated |
Standard Features | Optional Features |
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