MegaTorr^® Cryogenic Hydrogen Gas Purifiers

These PS7-CR bulk gas purifiers efficiently remove numerous impurities with high reliability, low cost, and high performance.

Uses an adsorption process to provide ultra-high purity hydrogen (H₂) gas for semiconductor applications
Two adsorber vessels alternate between purify and regeneration modes, providing continuous purification
Adsorber regeneration is accomplished by back flushing with purified H₂at an elevated temperature
Optimized design provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)

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Applications MegaTorr^® Cryogenic Hydrogen Gas Purifiers Applications

Product Specifications

Gas purified	H₂
Impurities removed	H₂O, O₂,CO, CO₂, THC (including CH₄), N₂ < 1 ppb
Maximum flow rates*	Nm³/hr	slpm
PS7-CR100	100	1,667
PS7-CR200	200	3,333
PS7-CR400	400	5,000
PS7-CR800	800	13,333
*Other flow rates are available. Contact Entegris for details.
Maximum pressure drop	< 0.7 bar (70 kPa)
Note:	Purifiers are gas specific and should only be used for the gas indicated

Standard Features	Optional Features
Automated microprocessor controller HMI (Human Machine Interface) Password protected control system System alarms H₂ leak detection sensor Vented cabinet purge High-temperature hardware interlock Over-pressurization safety relief system	Mass flowmeter with 4-20 mA output Inlet and outlet pressure transducers Instrument air management system Auto or manual bypass Ultrafine 0.003 µm particle filter Separate control power UPS - uninterruptible power supply MODBUS data communication port

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MegaTorr® Cryogenic Hydrogen Gas Purifiers