MegaTorr® PS7-PD Hydrogen Gas Purifiers
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- Semiconductor
- Data storage
- Flat panel display
- LED
- Solar
Specifications
Dimensions
Model | H (cm) | W (cm) | D (cm) | Weight |
PS7-PD05-* | 34.3 | 33.0 | 38.4 | <15 kg |
PS7-PD1-* | 100.0 | 76.2 | 48.3 | <150 kg |
PS7-PD2-* | 189.0 | 86.4 | 55.9 | <300 kg |
Gases purified | H2 | |
Impurities removed to <1 ppb | H2O, O2, CO, CO2, H2, He, Ar, THC (including CH4) | |
PD05 Series | Flow rates* | Power |
PS7-PD05-08 | 5.5 slpm (0.3 Nm3/hr) | 120 VAC or 230 VAC |
PS7-PD05-21 | 12.5 slpm (0.8 Nm3/hr) | 120 VAC or 230 VAC |
PS7-PD05-50 | 28.4 slpm (1.7 Nm3/hr) | 120 VAC or 230 VAC |
*Assuming 200 psig inlet pressure, 60 psig outlet pressure | ||
PD1 Series | Flow rates* | Power |
PS7-PD1-10 | 96 slpm (5.8 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-20 | 193 slpm (11.6 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-30 | 290 slpm (17.4 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-40 | 386 slpm (23.2 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-50 | 483 slpm (29.0 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-60 | 580 slpm (34.8 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-70 | 676 slpm (40.6 Nm3/hr) | 208 VAC or 230 VAC |
*Assuming 260 psig inlet pressure, 80 psig outlet pressure | ||
PD2 Series | Flow rates* | Power |
PS7-PD2-40 | 773 slpm (46.4 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-50 | 966 slpm (58.0 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-60 | 1,160 slpm (69.6 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-70 | 1,353 slpm (81.2 Nm3/hr) | 208 VAC or 230 VAC |
*Assuming 260 psig inlet pressure, 80 psig outlet pressure Notes: Purifiers are gas specific and should only be used for the gas indicated. Other flow rates are available. Contact Entegris for details. |
Features |
Palladium Advantages |
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