200 mm Process Wafer Carriers
Contact your Entegris account manager or
Wet etch and clean
Specifications
Materials: | PFA | |
Temperature limits: | Continuous use (process enhancement) | 165°C (329°F) |
Continuous use (traditional) | 180°C (356°F) | |
Wafer insertion | 290°C (554°F) | |
Wafer capacity: | Process wafer carrier | 25, 26, or 50 |
Process enhancement wafer carrier | 50 |
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