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200 mm Process Wafer Carriers

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Our traditional molded PFA process wafer carriers and modular construction PFA process enhancement wafer carriers are designed for wet chemical processing applications in 200 mm fabs.

The open flow carriers allow solutions to pass through evenly and quickly
Constructed of chemical-resistant PFA material enables your process to remain uncontaminated, maintaining chemical integrity

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CAD CAD Files

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Applications 200 mm Process Wafer Carriers Applications

Wet etch and clean

Specifications

Drawings

Product Specifications

Materials	PFA
Temperature limits	Continuous use (process enhancement)	165°C (329°F)
	Continuous use (traditional)	180°C (356°F)
	Wafer insertion	290°C (554°F)
Wafer capacity	Process wafer carrier	25, 26, or 50
	Process enhancement wafer carrier	50

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Reference Materials Product Documentation

Published Nov 28, 2023 Data Sheet 200 mm Process Wafer Carriers

1.8 MB

Published Nov 28, 2023 Data Sheet 200 mm Process Wafer Carriers - A4

1.8 MB

Part Numbers

200 mm Process Wafer Carriers Part Numbers

Part Number	Product Type	Wafer Capacity	Profile	End Wall Handle Type	End Wall Flange Type	Side Wall	Top Flanges	Rotated Rail	End Wall Configuration
A192-80M-0215	Process wafer carrier	25	High	Standard, high position	Standard outboard	Open	No	N/A	Solid
A192-80MNH-0215	Process wafer carrier	25	High	N/A	Standard outboard	Open	No	N/A	Solid
A192-80MU1-0215	Process wafer carrier	25	High	N/A	Standard outboard	Open	No	N/A	"U" shaped
A192-81M-0215	Process wafer carrier	25	Low	Standard, high position	Standard outboard	Open	No	N/A	Solid
A192-81MJ26-HP0215	Process wafer carrier	26	Low	Standard, high position	Notched wide outboard	Open	No	N/A	Solid
A192-82M-0215	Process wafer carrier	50	Low	Standard, high position	Standard outboard	Open	No	N/A	Solid
A200-80MG-0215	Process wafer carrier	25	High	Large size, high position	C-style outboard	Open	No	N/A	Solid
A200-80MW-0215	Process wafer carrier	25	High	Standard, high position	C-style outboard	Open	No	N/A	Solid
A200-80SMS-0215	Process wafer carrier	25	High	N/A	C-style outboard and top center immersion style	Open	No	N/A	"U" shaped
A220-200B50IP-0215	Process enhancement wafer carrier	50	Enhanced	N/A	Lift points and V-notch locators	Open	No	Yes	Solid
A220-200B50MIP-0215	Process enhancement wafer carrier	50	Enhanced	N/A	Lift points and V-notch locators	Open	No	N/A	Solid