-
Sign In
Sign In
Forgot Password?Please enter the email address for your account. A link to change your password will be emailed to you.
All Fields Required - Sign Out
- My Account
-
Quick Order Pad
Enter Part Numbers below to add them to your cart
Need to order more than 3 items?
Go to the Quick Order Page - Quick Order Pad
- Contact Us
- Cart
- Language
- Currency
200 mm Process Wafer Carriers
Interested in 200 mm Process Wafer Carriers?
Contact your Entegris account manager or Contact Us
Top of page
Reference Materials
Applications
Wet etch and clean
Specifications
| Materials: | PFA | |
| Temperature limits: | Continuous use (process enhancement) | 165°C (329°F) |
| Continuous use (traditional) | 180°C (356°F) | |
| Wafer insertion | 290°C (554°F) | |
| Wafer capacity: | Process wafer carrier | 25, 26, or 50 |
| Process enhancement wafer carrier | 50 | |
Successfully Opted for software Updates
