198/192 Series 200 mm Wafer Transport Carriers
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Applications
198/192 series 200 mm wafer transport carriers are ideal for:
- In-fab transport
- Process tool interface
- Storage of fab wafers
Specifications
| D1 dimension | 25.4 mm (1.00"), dependent on cassette |
| Pocket spacing | 6.4 mm (0.25"), dependent on cassette |
| Pocket flat | 1.7 mm (0.07") dependent on cassette |
| Wafer capacity | 25 |
| Pins and holes | on top rail |
| Locating track notches | at center of the 13th pocket |
| Side walls | Open |
| Compatible storage boxes | E99, E210, HA200 |
Material Specifications
| STAT-PRO 9000 | Next Generation advanced wafer transport carrier material | |
| Static dissipative blend of Carbon Nanotube (CNT) enhanced polyetheretherketone (PEEK™) carbon compound | ||
| Temperature limits: | 120°C (248°F) continuous use | |
| 340°C (644°F) wafer insertion | ||
| STAT-PRO 3000 | Advanced wafer transport carrier material | |
| Static dissipative blend of PEEK and carbon fiber | ||
| Temperature limits: | 120°C (248°F) continuous use | |
| 340°C (644°F) wafer insertion | ||
| STAT-PRO 100 | Wafer transport carrier material | |
| Static dissipative blend of polypropylene (PP) and carbon powder | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
| FluoroSentry® | Wafer transport carrier material | |
| Advanced blend of polybutyleneterephthalate (PBT) and carbon fiber | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 95°C (203°F) wafer insertion | ||
| Blue Polypropylene | Wafer transport carrier material | |
| PP with added colorant | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
Successfully Opted for software Updates
Cassette Molded Options
Carrier ID Option
Part Numbers
| Part Number | End Wall Handle Type | Color | RFID | Materials | "H" Bar End Flange |
|---|---|---|---|---|---|
| FA192-80MNS-7902 | Standard, high position | Black | No | FluoroSentry® carbon fiber PBT | No |
| FA192-80MNSM-7902 | Standard, high position | Black | Yes | FluoroSentry® carbon fiber PBT | No |
| K198-80M-97C02 | Standard, high position | Black | No | STAT-PRO® 9000 CNT PEEK | No |
| K198-80MB-97C02 | Standard, high position | Black | No | STAT-PRO® 9000 CNT PEEK | Yes |
| KA198-80M-47C02 | Standard, high position | Black | No | STAT-PRO® 3000 carbon fiber PEEK | No |
| KA198-80M-47C05 | Standard, high position | Green | No | STAT-PRO® 3000 carbon fiber PEEK | No |
| KA198-80MB-47C02 | Standard, high position | Black | No | STAT-PRO® 3000 carbon fiber PEEK | Yes |
| KA198-80MRM-47C02 | Standard, high position | Black | Yes | STAT-PRO® 3000 carbon fiber PEEK | No |
| PA192-80M-0603 | Standard, high position | Blue | No | Polypropylene | No |
| PA192-80M-0604 | Standard, high position | Red | No | Polypropylene | No |
| PA192-80M-0605 | Standard, high position | Green | No | Polypropylene | No |
| PA192-80M-0607 | Standard, high position | Yellow | No | Polypropylene | No |
| PA192-80M-0609 | Standard, high position | Orange | No | Polypropylene | No |
| PA192-80M-0615 | Standard, high position | Natural | No | Polypropylene | No |