20X Series 200 mm Wafer Transport Carriers
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Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- In-fab transport
- Process tool interface
- Secure wafer storage
Specifications
| D1 dimension | 25.4 mm (1.00"), dependent on cassette |
| Pocket spacing | 6.4 mm (0.25"), dependent on cassette |
| Pocket flat | 1.7 mm (0.07") dependent on cassette |
Identification Options
We offer a variety of options for carrier identification, including:
- Bar code labels
- RFID tags
- Laser marking
- Colored ID tags
- Cardholders
Contact Entegris to determine a suitable identification method for your application.
| Wafer capacity | 26: XT205-0100 |
| 25: all others | |
| 13: K213 | |
| Pins and holes | on top rail (unless noted) |
| Locating track notches | at center of the 13th pocket |
| Side walls | Closed |
| Compatible storage boxes | E210: XT205-0100 |
| E99, E210, HA200: all others |
Material Specifications
| STAT-PRO 9000 | Next Generation advanced wafer transport carrier material | |
| Static dissipative blend of Carbon Nanotube (CNT) enhanced polyetheretherketone (PEEK™) carbon compound | ||
| Temperature limits: | 120°C (248°F) continuous use | |
| 340°C (644°F) wafer insertion | ||
| STAT-PRO 3000 | Advanced wafer transport carrier material | |
| Static dissipative blend of PEEK and carbon fiber | ||
| Temperature limits: | 120°C (248°F) continuous use | |
| 340°C (644°F) wafer insertion | ||
| STAT-PRO 100 | Wafer transport carrier material | |
| Static dissipative blend of polypropylene (PP) and carbon powder | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
| EMSTAT PY | Wafer transport carrier material | |
| Static dissipative blend of PEEK and carbon fiber | ||
| Temperature limits: | 120°C (248°F) continuous use | |
| 340°C (644°F) wafer insertion | ||
| EMSTAT AR+ | Wafer transport carrier material | |
| Static dissipative blend of polypropylene (PP), carbon fiber and PTFE | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
| EMSTAT AR | Wafer transport carrier material | |
| Static dissipative blend of polypropylene (PP) and carbon fiber | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
| Blue Polypropylene | Wafer transport carrier material | |
| PP with added colorant | ||
| Temperature limits: | 55°C (131°F) continuous use | |
| 70°C (158°F) wafer insertion | ||
Successfully Opted for software Updates
Cassette Molded Options
Carrier ID Option
Part Numbers
| Part Number | Wafer Capacity | End Wall Handle Type | Color | RFID | Material | End Wall Flange Type | Pins and Holes |
|---|---|---|---|---|---|---|---|
| K213-80SHH-97C02 | 13 | Standard, high position | Black | No | STAT-PRO® 9000 | Standard outboard | Yes |
| K213-80SHHR1-97C02 | 13 | Standard, high position | Black | Yes | STAT-PRO® 9000 | Standard outboard | Yes |
| KA202-80S-47C02 | 25 | None | Black | No | STAT-PRO® 3000 | Standard outboard | No |
| KA202-80S-47C05 | 25 | None | Green | No | STAT-PRO® 3000 | Standard outboard | No |
| KA202-80SH-47C02 | 25 | Standard, mid position | Black | No | STAT-PRO® 3000 | Standard outboard | Yes |
| KA202-80SHH-47C02 | 25 | Standard, high position | Black | No | STAT-PRO® 3000 | Standard outboard | Yes |
| KX202-0100-97C02 | 25 | Standard, mid position | Black | No | STAT-PRO® 9000 | Standard outboard | Yes |
| KX202-0200-97C02 | 25 | None | Black | No | STAT-PRO® 9000 | Standard outboard | Yes |
| XT201-0104 | 25 | Standard, mid position | Red | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT201-0105 | 25 | Standard, mid position | Green | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT201-0107 | 25 | Standard, mid position | Black | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT201-0300 | 25 | Standard, mid position | Black | No | EMSTAT™ AR | Standard outboard | No |
| XT202-0100 | 25 | Standard, mid position | Black | No | EMSTAT™ PY PEEK™ | Standard outboard | Yes |
| XT202-0500 | 25 | Standard, high position | Black | No | EMSTAT™ PY PEEK™ | Standard outboard | Yes |
| XT203-0100 | 25 | Standard, mid position | Black | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT203-0120 | 25 | Standard, mid position | Gray | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT203-0500 | 25 | Standard, high position | Black | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT203-0510 | 25 | Standard, high position | Blue | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT203-0520 | 25 | Standard, high position | Gray | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT203-0530 | 25 | Standard, high position | Green | No | EMSTAT™ AR+ | Standard outboard | Yes |
| XT204-0200 | 25 | None | Black | No | EMSTAT™ HV+ | Standard outboard | Yes |
| XT204-0500 | 25 | Standard, high position | Black | No | EMSTAT™ HV+ | Standard outboard | Yes |