20X Series 200 mm Wafer Transport Carriers

Download Image

Designed for advanced wafer transport, our 200 mm wafer carriers offer dramatic performance benefits over traditional low- and midrange wafer carriers.

The wafer is in a predictable location, enabling precise wafer access
Reliable equipment operation on process tools and automated materials handling systems
Secures and protects wafer against contamination and damage

Read More Read Less

Specify Your Part

Wafer Capacity

End Wall Handle Type

Color

RFID

Material

End Wall Flange Type

Pins and Holes

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly.

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country/region

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

Company Address

You are required to accept the Captcha.

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

CAD CAD Files

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Applications 20X Series 200 mm Wafer Transport Carriers Applications

In-fab transport
Process tool interface
Secure wafer storage

Specifications

Drawings

D1 dimension	25.4 mm (1.00"), dependent on cassette
Pocket spacing	6.4 mm (0.25"), dependent on cassette
Pocket flat	1.7 mm (0.07") dependent on cassette

Identification Options

We offer a variety of options for carrier identification, including:

Bar code labels
RFID tags
Laser marking
Colored ID tags
Cardholders

Contact Entegris to determine a suitable identification method for your application.

Product Specifications

Wafer capacity	26: XT205-0100
	25: all others
	13: K213
Pins and holes	on top rail (unless noted)
Locating track notches	at center of the 13th pocket
Side walls	Closed
Compatible storage boxes	E210: XT205-0100
	E99, E210, HA200: all others

Material Specifications

STAT-PRO 9000	Next Generation advanced wafer transport carrier material
	Static dissipative blend of Carbon Nanotube (CNT) enhanced polyetheretherketone (PEEK™) carbon compound
	Temperature limits:	120°C (248°F) continuous use
		340°C (644°F) wafer insertion
STAT-PRO 3000	Advanced wafer transport carrier material
	Static dissipative blend of PEEK and carbon fiber
	Temperature limits:	120°C (248°F) continuous use
		340°C (644°F) wafer insertion
STAT-PRO 100	Wafer transport carrier material
	Static dissipative blend of polypropylene (PP) and carbon powder
	Temperature limits:	55°C (131°F) continuous use
		70°C (158°F) wafer insertion
EMSTAT PY	Wafer transport carrier material
	Static dissipative blend of PEEK and carbon fiber
	Temperature limits:	120°C (248°F) continuous use
		340°C (644°F) wafer insertion
EMSTAT AR+	Wafer transport carrier material
	Static dissipative blend of polypropylene (PP), carbon fiber and PTFE
	Temperature limits:	55°C (131°F) continuous use
		70°C (158°F) wafer insertion
EMSTAT AR	Wafer transport carrier material
	Static dissipative blend of polypropylene (PP) and carbon fiber
	Temperature limits:	55°C (131°F) continuous use
		70°C (158°F) wafer insertion
Blue Polypropylene	Wafer transport carrier material
	PP with added colorant
	Temperature limits:	55°C (131°F) continuous use
		70°C (158°F) wafer insertion

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Jul 1, 2022 Data Sheet 20X Series 200 mm Wafer Transport Carriers

1.1 MB

Published Jul 1, 2022 Data Sheet 20X Series 200 mm Wafer Transport Carriers - A4

1.1 MB

Videos

Cassette Molded Options

Carrier ID Option

Part Numbers

20X Series 200 mm Wafer Transport Carriers Part Numbers

Part Number	Wafer Capacity	End Wall Handle Type	Color	RFID	Material	End Wall Flange Type	Pins and Holes
K213-80SHH-97C02	13	Standard, high position	Black	No	STAT-PRO® 9000	Standard outboard	Yes
K213-80SHHR1-97C02	13	Standard, high position	Black	Yes	STAT-PRO® 9000	Standard outboard	Yes
KA202-80S-47C02	25	None	Black	No	STAT-PRO® 3000	Standard outboard	No
KA202-80S-47C05	25	None	Green	No	STAT-PRO® 3000	Standard outboard	No
KA202-80SH-47C02	25	Standard, mid position	Black	No	STAT-PRO® 3000	Standard outboard	Yes
KA202-80SHH-47C02	25	Standard, high position	Black	No	STAT-PRO® 3000	Standard outboard	Yes
KX202-0100-97C02	25	Standard, mid position	Black	No	STAT-PRO® 9000	Standard outboard	Yes
KX202-0200-97C02	25	None	Black	No	STAT-PRO® 9000	Standard outboard	Yes
XT201-0104	25	Standard, mid position	Red	No	EMSTAT™ AR+	Standard outboard	Yes
XT201-0105	25	Standard, mid position	Green	No	EMSTAT™ AR+	Standard outboard	Yes
XT201-0107	25	Standard, mid position	Black	No	EMSTAT™ AR+	Standard outboard	Yes
XT201-0300	25	Standard, mid position	Black	No	EMSTAT™ AR	Standard outboard	No
XT202-0100	25	Standard, mid position	Black	No	EMSTAT™ PY PEEK™	Standard outboard	Yes
XT202-0500	25	Standard, high position	Black	No	EMSTAT™ PY PEEK™	Standard outboard	Yes
XT203-0100	25	Standard, mid position	Black	No	EMSTAT™ AR+	Standard outboard	Yes
XT203-0120	25	Standard, mid position	Gray	No	EMSTAT™ AR+	Standard outboard	Yes
XT203-0500	25	Standard, high position	Black	No	EMSTAT™ AR+	Standard outboard	Yes
XT203-0510	25	Standard, high position	Blue	No	EMSTAT™ AR+	Standard outboard	Yes
XT203-0520	25	Standard, high position	Gray	No	EMSTAT™ AR+	Standard outboard	Yes
XT203-0530	25	Standard, high position	Green	No	EMSTAT™ AR+	Standard outboard	Yes
XT204-0200	25	None	Black	No	EMSTAT™ HV+	Standard outboard	Yes
XT204-0500	25	Standard, high position	Black	No	EMSTAT™ HV+	Standard outboard	Yes