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Advanced Packaging

Solving heterogeneous integration challenges with advanced materials, purity, delivery, electrostatic discharge (ESD), and substrate management solutions.

see our solutions
Advanced Packaging

With today’s faster, more diverse, and increasingly integrated device designs, success depends not just on optimizing individual materials and process steps, but on preserving interface integrity throughout advanced packaging. As architectures evolve toward hybrid bonding, high density interconnects, and larger substrates, yield and reliability are increasingly determined by the condition of critical interfaces when they are formed. Entegris delivers proven technologies that help preserve interface integrity by controlling contamination, materials performance, substrate handling, electrostatic effects, and process variability at the most critical stage of your investment. Explore our solutions to the most common and complex advanced packaging challenges.

Interface Integrity

Explore how interface integrity drives yield, performance, and reliability in advanced packaging.
View solution

Interface Integrity

Explore how interface integrity drives yield, performance, and reliability in advanced packaging.
View solution

Interface Integrity

Explore how interface integrity drives yield, performance, and reliability in advanced packaging.
View solution
Substrate Handling

Reliable and flexible handling solutions for thick, thin, warped, and heavy payload substrates to prevent breakage, edge damage, and scratches.
High Viscosity Materials Handling

Filtration, packaging, and dispense solutions for photoresists, polyimides, epoxies, and glues to prevent microbubble and contamination defects.
Cu Plating

Deposition integrity solutions to ensure superior electrical performance.
Chemical Mechanical Planarization (CMP) 

Integrated CMP solutions for optimal polishing performance and lower cost of ownership.
Facility

Clean materials delivery and clean fab environment solutions to reduce fab defects and improve yield.
Preventing Electrostatic Discharge (ESD)

Safe and efficient ESD fluid management and substrate handling solutions.