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Enabling Advanced Lithography (EUV)
As semiconductor geometries grew smaller (sub 14nm), EUV lithography was developed to successfully scale down complex patterns on wafers for the most advanced technologies.
Extreme Ultraviolet reticle pods are highly-specialized pieces of equipment that fulfill a critical role in EUV lithography. They must protect the reticle during use, storage, and transportation while not introducing additional contamination or damage. Pods must be compatible with lithography equipment and be able to maintain a clean, dry atmosphere for the reticle. Precisely designed dual-pod configurations achieve these goals for reticles both with and without pellicles, ensuring the future of EUV lithography.
Featured White Paper
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
This paper explains the challenges inherent in designing pods for EUV lithography and proposes solutions that will allow more fabs to implement advanced lithography nodes at their facilities.
Featured Pictogram
Protecting and Transporting Extreme Ultraviolet (EUV) Reticles
Reliable patternmaking at such a fine scale requires ultraclean reticles. We can help you through your challenges of storing and transporting EUV reticles.
Learn more about our EUV lithography solutions
Product Solution
Advanced extreme ultraviolet light (EUV) reticle pod is designed to provide defect-free protection of EUV reticles enabling the high-volume manufacturing of advanced technology nodes during storage, handling and vacuum-transfer operations.