Integra® Plus WS Pneumatic Valves, 1 1/4”, 2-way
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Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Base chemistry applications where there is external exposure to base solution or its fumes
- Bulk chemical delivery (BCD) lines within semiconductor fabs
- Chemical mechanical planarization (CMP) slurry dispense
- Wet etch and clean (WEC) ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
Port Connection | Flow factor Cv | Flow factor Kv | Dimensions | |||
A | B | C | D | |||
1" PureBond pipe | 23.8 | 339.9 | 155.4 mm (6.12") | 35.1 mm (1.38") | 189.7 mm (7.47") | 100.1 mm 3.94") |
1 1/4" PrimeLock | 25.8 | 368.4 | 182.9 mm (7.20") | 35.1 mm (1.38") | 189.7 mm (7.47") | 100.1 mm (3.94") |
NOTE: To enable the remote position indication option you must order the Entegris sensor mounting assembly (01-1035661) and order the Omron position sensor (EE-SX770R or EE-SX770A), which is sold separately.
Materials of construction | All wetted parts: | PFA, PTFE | ||
Exterior actuator parts: | PVDF or ECTFE, red PVDF indicator | |||
Interior actuator parts: | PVDF, Viton®, EPDM, and PTFE | |||
Spring: | Coated stainless steel | |||
Operating conditions | Media pressure at: | 21°C (70° F) vacuum | Inlet/outlet | 913 mbar (27" Hg) to 552 kPa (80 psig) |
PVDF actuator | 100°C (212°F) | Inlet/outlet | 275 kPa (40 psig)* | |
ECTFE actuator | 35°C (95°F) | Inlet/outlet | 552 kPa (80 psig)* | |
Actuation pressure range (NC version only): | 414-552 kPa (60 - 80 psig)* | |||
Actuation pressure (NO version only): | 414 kPa (60 psig) | |||
Temperature range: | ||||
Ambient (PVDF actuator) | 21°-50°C (70°-122°F) | |||
Ambient (ECTFE actuator) | 21°-35°C (70°-95°F) | |||
Fluid (PVDF actuator) | 21°-100°C (70°-212°F) | |||
Fluid (ECTFE actuator) | 21°-35°C (70°-95°F) | |||
Pneumatic supply port: | 1/8" FNPT (refer to dimensional drawings for the pilot supply and pilot vent port locations) | |||
Environmental compliance: | RoHs, WEEE | |||
*Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data. |
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01-1035661
Remote position indication sensor mounting assembly for Integra® Plus WS pneumatic valves and EP PFA pneumatic valves
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WSP-NC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed weir valves
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WSP-NO-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open weir valves
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WSP-NC-P2-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed, 90° turn weir valves
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WSP-NO-P2-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open, 90° turn weir valves
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WSP-NC-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed weir valves with ECTFE actuators
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WSP-NO-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open weir valves with ECTFE actuators
Part Number | Actuator | Port 1 Connection | Port 2 Connection | Options |
---|---|---|---|---|
WSP20-2C-16P20K | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® | N/A |
WSP20-2C-16P20K-EC | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2C-16P20K-P2 | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® | Rotated actuator +90° - P2 |
WSP20-2C-16P20V | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2C-16P20V-EC | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2C-16P20V-P2 | Pneumatic normally closed | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
WSP20-2C-20KK | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | N/A |
WSP20-2C-20KK-EC | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2C-20KK-P2 | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | Rotated actuator +90° - P2 |
WSP20-2C-20KV | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2C-20KV-EC | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2C-20KV-P2 | Pneumatic normally closed | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
WSP20-2C-20VV | Pneumatic normally closed | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2C-20VV-EC | Pneumatic normally closed | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2C-20VV-P2 | Pneumatic normally closed | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
WSP20-2U-16P20K | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® | N/A |
WSP20-2U-16P20K-EC | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2U-16P20K-P2 | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® | Rotated actuator +90° - P2 |
WSP20-2U-16P20V | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2U-16P20V-EC | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2U-16P20V-P2 | Pneumatic normally open | 1" PureBond® pipe | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
WSP20-2U-20KK | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | N/A |
WSP20-2U-20KK-EC | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | ECTFE actuator with PFA nut |
WSP20-2U-20KK-P2 | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® | Rotated actuator +90° - P2 |
WSP20-2U-20KV | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2U-20KV-EC | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2U-20KV-P2 | Pneumatic normally open | 1 1/4" PrimeLock® | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
WSP20-2U-20VV | Pneumatic normally open | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | N/A |
WSP20-2U-20VV-EC | Pneumatic normally open | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | ECTFE actuator with PFA nut |
WSP20-2U-20VV-P2 | Pneumatic normally open | 1 1/4" PrimeLock® "SpaceSaver" | 1 1/4" PrimeLock® "SpaceSaver" | Rotated actuator +90° - P2 |
Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.