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Integra® Plus WS Pneumatic Valves, 3/4”, 2-way

Designed for use with corrosive chemicals in semiconductor processing applications, these valves provide system flexibility and easy installation into any fluid handling system. 
  • Weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean and free from contaminants
  • Single-piece diaphragm does not need adhesive and will not separate, increasing reliability in vacuum applications
  • PFA and PTFE wetted surfaces provide chemical resistance suitable for use with ultrapure chemicals, solvents and DI water
  • Optional ECTFE material is available for external, nonwetted components susceptible to external exposure to extreme base chemistry fumes and/or direct external contact with the base chemistry solution
  • A variety of connections including PrimeLock®, Flaretek®, “SpaceSaver” and PureBond® provide system flexibility and easy installation into any fluid handling system; bipolar connections (PureBond x PrimeLock or Flaretek) further reduce the footprint and lower costs
  • Remote electronic position sensing options are available for added safety

 

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