Integra® Plus WS Pneumatic Valves, 3/4”, 2-way
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Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.
- Base chemistry applications where there is external exposure to base solution or its fumes
- Bulk chemical delivery (BCD) lines within semiconductor fabs
- Chemical mechanical planarization (CMP) slurry dispense
- Wet etch and clean (WEC) ultrapure chemical handling
- TFT/LCD corrosive chemical handling
Specifications
| Port Connection | Flow factor Cv | Flow factor Kv | Dimensions | |||
| A | B | C | D | |||
| 3/4" PrimeLock | 13.7 | 195.6 | 156.5 mm (6.16") | 28.4 mm (1.12") | 180.1 mm (7.09") | 90.4 mm (3.56") |
| 3/4" Flaretek | 13.7 | 195.6 | 149.6 mm (5.89") | 28.4 mm (1.12") | 180.1 mm (7.09") | 90.4 mm (3.56") |
| 3/4" PureBond pipe | 13.1 | 187.1 | 155.4 mm (6.12") | 28.4 mm (1.12") | 180.1 mm (7.09") | 90.4 mm (3.56") |
NOTE: To enable the remote position indication option you must order the Entegris sensor mounting assembly (01-1035661) and order the Omron position sensor (EE-SX770R or EE-SX770A), which is sold separately.
| Materials of construction | All wetted parts: | PFA, PTFE | ||
| Exterior actuator parts: | PVDF or ECTFE, red PVDF indicator | |||
| Interior actuator parts: | PVDF, Viton®, EPDM, and PTFE | |||
| Spring: | Coated stainless steel | |||
| Operating conditions | Media pressure at: | 21°C (70° F) vacuum | Inlet/outlet | 913 mbar (27" Hg) to 552 kPa (80 psig) |
| PVDF actuator | 100°C (212°F) | Inlet/outlet | 275 kPa (40 psig)* | |
| ECTFE actuator | 35°C (95°F) | Inlet/outlet | 552 kPa (80 psig)* | |
| Actuation pressure range (NC version only): | 414-552 kPa (60 - 80 psig)* | |||
| Actuation pressure (NO version only): | 414 kPa (60 psig) | |||
| Temperature range: | ||||
| Ambient (PVDF actuator) | 21°-50°C (70°-122°F) | |||
| Ambient (ECTFE actuator) | 21°-35°C (70°-95°F) | |||
| Fluid (PVDF actuator) | 21°-100°C (70°-212°F) | |||
| Fluid (ECTFE actuator) | 21°-35°C (70°-95°F) | |||
| Pneumatic supply port: | 1/8" FNPT (refer to dimensional drawings for the pilot supply and pilot vent port locations) | |||
| Environmental compliance: | RoHs, WEEE | |||
| *Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data. | ||||
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01-1035661
Remote position indication sensor mounting assembly for Integra® Plus WS pneumatic valves and EP PFA pneumatic valves
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WSP-NC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed weir valves
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WSP-NO-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open weir valves
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WSP-NC-P2-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed, 90° turn weir valves
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WSP-NO-P2-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open, 90° turn weir valves
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WSP-NC-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally closed weir valves with ECTFE actuators
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WSP-NO-EC-RKIT
Repair kit for 3/4", 1", or 1 1/4" Integra® Plus WS 2-way, pneumatic normally open weir valves with ECTFE actuators
Note:
- Not all configurations are permitted. Contact Entegris if multiple special order features are required.