Specialty Chemical & Engineered Materials Operational Excellence
Our vision is simple:
- Establish Entegris as a world-class specialty materials company
- Deliver material solutions that enable our customers technology and business roadmaps
- Continuously improve our supply of safe, quality, competitive materials
Safe and robust supply chain
Predictable and stable quality
SPC and change control
World-class customer service
Robust beta to HVM
Scalable manufacturing platforms
Quality by design
Partners and investments
Entegris Supply Chain Forum
Join Neil Richards, SVP global operations and supply chain, and Sandy Gauthier, VP global supply management as they discuss:
- The purity roadmap for materials and filtration
- Navigating supply chain challenges resulting from COVID-19
- Collaboration and localization to ensure continuity
This presentation is followed by live Q&A with Entegris operational experts.
Featured White Paper
The China Semiconductor Mandate for Success
It is important to ensure that materials suppliers outside of China have a solid understanding of how to address the challenges particular to this semiconductor manufacturing infrastructure.
Featured White Paper
Building a Reliable and Predictable Specialty Chemicals Supply Chain for Semiconductor Manufacturing Success
This white paper examines the technology advancements required to support advanced node manufacturers, and the role the advanced materials supply chain plays in supporting new opportunities and solving challenges to help semiconductor manufacturers remain competitive.
Operational Excellence at Entegris
A premier advanced materials company
Pictorial explaining operational excellence at Entegris and our focus on material purity and preventing defects, our adherence to safety and environmental standards with technology such as SDS® cylinders, gas cabinets, and delivery systems, and our ability to supply locally.
Global Operational Excellence at Entegris A Premier Advanced Materials Company
Pictorial explaining operational excellence at Entegris and our focus on material purity and preventing defects, our adherence to safety and environmental standards with technology such as SDS® cylinders, gas cabinets, and delivery systems, and our ability to supply locally around the world.
Quality and Predictablity
The pursuit of advanced nodes is driving tighter requirements for materials purity and reduction in variability as the semiconductor manufacturing environment is among the purest on Earth. Through SEMI, the semiconductor industry spent decades developing standards for raw materials, components, and analytical methods to ensure that the robust delivery of high-purity chemicals could be replicated across the industry. In most cases, these standards are orders of magnitude more stringent for contamination control than other industries, including the pharmaceutical industry.
To mitigate lengthy delivery shipments for high volumes of chemistries and gases, investing in a local supply chain will simplify logistics, reduce supply lead times, and lower costs.
Specialty Chemical & Engineered Materials Key Manufacturing Locations
We provide a family of post chemical mechanical planarization (post-CMP) cleaning solutions. These solutions offer excellent corrosion control, surface contamination removal and cost of operation performance.
The TitanKlean® family of solutions covers all application needs from hard mask preservation to partial removal and full removal, and offers solutions compatible with all advanced metalization schemes. Initially designed to meet the Post Etch Residue and Hard Mask Removal requirements in Advanced Logic, the application space is expanding in to advanced memory applications.
SDS®3 Safe Delivery Source is the safest technology available for delivering highly toxic gases. Designed using specially formulated carbon-based adsorbents in the form of pucks, SDS3 systems both store and deliver gas subatmospherically.
SDS®2 Safe Delivery Source is one of the safest technologies available for delivering highly toxic gases. Designed using specially formulated carbon-based adsorbents in the form of small beads, SDS2 systems both store and deliver gas subatmospherically.
The PDS®-A gas package is used for high-volume gas applications and specialty processes. The package stores and delivers highly toxic gases subatmospherically, substantially reducing the risk of catastrophic gas release and providing a significant safety and equipment damage benefit.
The PDS®-V gas package is for high-volume uses and specialty processes. It stores gas under pressure, but delivers gases subatmospherically. It is based on our VAC® gas package technology platform.
The PDS®+100 technology is designed to store and deliver toxic gases at safer, lower pressure (100 psig) than typical high pressure cylinders. The PDS+100 gas cylinder utilizes an internally-mounted set-pressure regulator (SPR) to control cylinder output.
The Vacuum Actuated Cylinder® (VAC) uses sets of valves and pressure regulators to store gas under pressure but deliver them subatmospherically. This is safer than a traditional high-pressure gas cylinder for the lesser toxic gases.
The ProE-Vap® 200 delivery system is designed for solid precursors used in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) processes. It provides a stable mass flux for a wide variety of solid materials used for current and future technology nodes. Solid precursors are difficult to deliver consistently into deposition chambers due to their low vapor pressure and limited thermal stability. The ProE-Vap 200 system overcomes these problems and offers a solution that is unmatched in the industry.
Caerus™ 100 series is a family of aluminum-based oxide coatings that are deposited at low temperatures with superior film quality. Our Caerus coatings are highly conformal, dense, pinhole-free and exhibit homogeneous microstructure. The coatings have excellent adhesion and provide outstanding corrosion and etch resistance properties. They are also characterized by superb electrical voltage stand-off and exceptional trace metal diffusion barrier layer characteristics.
Leveraging proprietary coating technologies and innovative manufacturing capabilities, our electrostatic chucks offer a very flat clamped wafer surface, uniform thermal properties, improved gas-cooling, superior plasma erosion resistance and ultra-low particle and metal generation. These advanced wafer contact surfaces are made of materials with tailorable electrical properties, have an optimal wafer contact area that improves overall performance and lifetime while minimizing contamination.