Liquid Filters


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The Fight for Purity in Chemical Manufacturing
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Clean, high-throughput filtration for bulk photochemical manufacturing and solvent applications.
Brand Name
  • Microgard™
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-28 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Bulk high-viscosity photochemical filter
Brand Name
  • Microgard™
Chemistry
  • High Viscosity
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Clean, solvent-based, bulk photochemical filter
Brand Name
  • Microgard™
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Solvent-based, bulk photochemical filter
Brand Name
  • Microgard™
Chemistry
  • Photoresist
  • Photochemical
  • Solvent
Feature Size (Layer)
  • >90 nm
Installation Point
  • Bulk
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