End-to-End Gas Filtration Solutions
Quick Links
Eliminating the contaminants in your process begins by taking a holistic view of the gas delivery path and identifying the threats allows you to implement the right solutions to reduce wafer defects.
Gas filtration, vital to delivering the required purity, has a range of perceptions related to its effective lifetime. Each gas and process step has unique conditions that influence selecting the optimized solution.
Featured Pictogram
Hiding in Plain Sight
For a semiconductor fab, a contaminated wafer is a mystery to be solved. The impact on wafer yield and device performance is significant. In this case, the combination of an aged gas filter in an automated delivery system are prime suspects.
Featured Videos
History of Gas Filtration
Entegris' Rob Zeller walks us through the long history of gas filters and the adaptations of materials, technology, and people to find the purity needed in every aspect of our lives.
Gas Filtration: Hiding in Plain Sight
Learn how the most commonly used contaminant removal mechanisms ensure the purity of process gases and reduce defectivity.
Featured White Paper
Hiding in Plain Sight: A Preventive Maintenance Strategy to Improve Gas Purity and Reduce Wafer Defects
This white paper highlights a preventive maintenance strategy for reducing wafer defects caused from a potentially unlikely source, an older gas filter. The contaminant capture mechanisms, process flow, and solutions are discussed to reduce variability in your processes.
Clean Gas Delivery
Chip designs continue to push chip manufacturing challenges to new limits — the sensitivity to contamination during manufacturing processes has increased significantly. To meet the needs of these processes, gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability. Do you have the right end-to-end gas purity tools?
Featured Brochure
BrochureFeatured Product Solutions
Nickel, stainless steel, and PTFE filter technologies
Our ultrapure gas filtration products offer 0.003 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Rapid venting to atmosphere without adding particles to the chamber
Our gas diffusers are compatible with most system designs for easy installation or retrofit into load lock chambers, cooling chambers, transfer chambers, and process chambers.
A wide variety of materials are available to purify gas to parts-per-trillion (ppt) levels
Built using advanced technology, our innovative gas microcontamination control products effectively remove gaseous contaminants with high reliability, low cost, and high performance. Stand-alone gas purification systems offer in-situ regeneration with advanced control to meet your specifications. Our vast portfolio of gas purifiers and environmentally-friendly systems are designed to improve gas consistency, lifetime, and outlet purity.
Gas blends in a single package reduce the need to co-flow species from multiple cylinders
As experts in applied process gas, we are always working to increase your efficiency, safety, and performance in gas applications. Creating gas blends in customized proportions is yet another way we can support your needs.
Safe and efficient technologies to deliver toxic gases
We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.
High-purity gas delivery systems
Our high-purity gas cabinet systems are designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.
