The Electronic Specialty Gas Conference provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare, and specialty gas markets that are critical to the continued growth of the electronics industry.
The Electronic Specialty Gas Conference provides a forum of engagement and learning around the market, technology trends, and market drivers for electronic gases. The conference includes sections focusing on developments in the bulk, rare, and specialty gas markets that are critical to the continued growth of the electronics industry./content/entegris-live/en/home/about-us/events/electronic-specialty-gas-conference-2021
October 12-14, 2021
Visit our booth to learn more about our safe and efficient technologies to deliver toxic gases, our comprehensive container portfolio for solids precursors, and contamination control solutions.
October 12, 10:45–12:00 PM | Sandy Gauthier, VP Global Supply Chain
- Panel Discussion: Impact of Supply Chain by Semiconductor Investments in the U.S. (Replay: 10/12 9:45 -10:30 PM)
- Overcoming the Challenges of Delivering Vapor from Solid Sources
- Entegris as a world-class specialty materials company
- Deliver material solutions that enable our customers technology and business roadmaps
- Continuously improve our supply of safe, quality, competitive materials
Gas purity must extend through the full supply chain to prevent process excursions and improve device performance and reliability.
Gas blends in a single package reduce the need to co-flow species from multiple cylinders
As experts in applied process gas, we are always working to increase your efficiency, safety and performance in gas applications. Creating gas blends in customized proportions is yet another way we can support your needs.
The right gas the right way
You need the right gas at the right time in the right package, and we can help. When it comes to gas and gas delivery, go with the experts for your Arsine, Phosphine, Boron Trifluoride and Germanium Tetrafluoride needs.
Safe and efficient technologies to deliver toxic gases
We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.
High-purity gas delivery systems
Entegris high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.
A wide variety of materials are available to purify gas to parts-per-trillion (ppt) levels from point-of-use to bulk applications.
Built using advanced technology, our innovative gas microcontamination control products effectively remove gaseous contaminants with high reliability, low cost, and high performance.
Nickel, stainless steel, Hastelloy®, and PTFE filter technologies.
Entegris ultrapure gas filtration products offer 0.0015 micron particle filtration for ultrapure gas applications. Wafergard® gas filters enable higher process gas throughput while reducing the overall gas box footprint.
Fast vent diffusers with no introduction or disturbance of particles in process chambers.
Chambergard™ fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times
Solution for airborne molecular contamination (AMC) control.
Entegris provides a portfolio of airborne molecular contamination control to help you control contaminants in the entire fab and protecting both process equipment and wafers from the damaging effects of AMC.